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Development of an optical beam manipulator based on micromachine technologies

基于微机械技术的光束操纵器的研制

基本信息

批准号：
06555018
负责人：
FUJITA Hiroyuki
金额：
$ 5.95万
依托单位：
Institute of Industrial Science, The University of Tokyo
依托单位国家：
日本
项目类别：
Grant-in-Aid for Developmental Scientific Research (B)
财政年份：
1994
资助国家：
日本
起止时间：
1994 至 1995
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-06555018/
关键词：
Micromachine Single Cristal Quartz Anisotropic Etching Optical Beam handling Piezoelectric Actuator Optical Chopper Nonlinear Oscillator Optical Matrix Switch 光マトリックスイッチ非ビーム操作

项目摘要

The purpose of this research is to fabricate micro miniature optomechanical devices for switching, chopping, directing and scanning optical beams by IC-based micromachining technology. We have built micro optomechanical devices composed of chopping plates, micromirrors and microactuators. Semiconductor technologies such as photolithograph and etching were utilized to realize many microstructures which were more than 100mum in height and had accuracy of 1mum. One device is an optical chopper composed of a chopping plate with slits and piezoelectric actuators to drive the plate. Another device is a matrix optical beam switch composed of arrays of micromirrors ; each mirror is suspended by thin and long tortioal beams and can be bent 90 degrees by electrostatic force.Following results have been obtained :(1) A single cristal quartz substrate was anisotropically etched to build a actuator which produces displacement over 100mum in resonance at 2.7 kHz. The actuator was successfully applied to an optical beam chopper. Another type of actuator produced 50-100 mum static displacement at the end plate when the multi-folded suspention attached to the plate was in resonant vibration at very high resonant mode. The actuator was applied to an optical ON-OFF switch.(2) Arrays of micromirrors were fabricated on silicon substrate. Each mirror was suspended by two tortion bars and it could be bent as much as 90 degrees by electrostatic force. Directions of optical beams from collimated beam fibers were changed by inserting micromirrors at certain locations. A matrix optical switch was realized by using the device ; the insertion loss was 9.6 dB and ON-OFF ration and cross talks were less than -60 dB.

本研究旨在利用集成电路微机械加工技术制作微小型光机械装置，以实现光束的切换、斩波、导向及扫描。我们已经建立了微光学机械装置组成的砧板，微镜和微致动器。利用光刻和刻蚀等半导体技术，实现了许多高度超过100 μ m、精度为1 μ m的微结构。一种装置是由具有狭缝的斩波板和驱动该板的压电致动器组成的光学斩波器。另一种器件是由微镜阵列组成的矩阵式光束开关，每个微镜由细长的扭转梁悬挂，每个微镜在静电力的作用下可以弯曲90度，得到了以下结果：（1）用各向异性腐蚀法制作了一个在2.7kHz谐振频率下产生100 μ m以上位移的驱动器。该驱动器已成功地应用于光学斩束器中。另一种类型的致动器产生50-100 μ m的静态位移时，连接到板的多折叠悬架在非常高的共振模式下的共振振动的端板。该驱动器应用于光学开关。(2)在硅衬底上制作了微镜阵列。每面镜子都由两个扭杆悬挂，可以通过静电力弯曲90度。通过在一定位置插入微镜，改变了准直光束光纤的光束方向。用该器件实现了矩阵光开关，插入损耗为9.6dB，开关比和串扰小于-60dB。