Biologically-Inspired Machines Composed of Many Integrated Micromachines

生物系统和器官由许多简单的元素组成，通过协调元素的行为来执行复杂的功能。纤毛和由纤毛虫组成的免疫系统就是这样的例子。受生物系统的启发，我们研究了由多个微机器组成的机械系统的分布式体系结构。调查的重点是此类机器的制造和分散控制。微机械元件具有传感器、致动器和电子电路，所有这些都集成在一起。我们选择了一种智能蜂窝输送机作为研究对象。排列在平面基板上的微执行器在其上输送物体。微机器中的控制电路根据来自自身和周围微机器的传感器的信息来确定每个执行器的运动。得到了以下结果：(L)研究了微机械定位定向任务的控制逻辑。该任务应由GR…完成由控制逻辑单独控制的微执行器的更多OUP工作。我们扩展了二维元胞自动机来处理传感器输入和从相邻微机器获得的信息，并采用它们作为控制器。通过进化算法对控制规则进行优化，根据每条规则的仿真性能选择较优的规则。仿真模型包括物体运动动力学和摩擦动力学。能够定位和定位物体的规则在不到100代的时间里进化而来。(2)我们还设计了分类任务的控制电路。该系统识别不同形状的物体，并根据它们的形状向不同的方向输送它们。研制并运行了阵列式执行器、形状识别分布式逻辑和执行器高压驱动器等子系统。这些子系统的系统集成正在进行中。(3)开发了芯片与电子电路、芯片与微机械传感器和执行器的混合集成技术。这些技术允许我们分别制造这两个芯片，并提高成品率其中一种方法被称为硅主板技术。每个芯片的一侧边缘通过深度干法蚀刻加工成微连接器。芯片被插入到接收器中，接收器在一个更大的芯片--主板上加工。另一项技术是利用芯片上的微孔进行堆叠集成。我们通过这些孔确认了电气芯片和微机械芯片之间有足够的电气和机械互连。较少

Biological systems and organs, which are composed of many simple elements, perform complicated functions by coordinating the behavior of elements. Cilia and the immune system composed of limphocites are such examples. Inspired by biological systems, we have investigated the distributed architecture of mechanical systems composed of many micromachines. The investigation focused in fabrication and decentralized control of such machines. The micromachine element has sensors, actuators and electronic circuits, all integrated together. We selected an intelligent cellular conveyor as the research target. Micro actuators arrayed on a planar substrate convey objects on them. Based on the information from sensors of its own and surrounding micromachines, the control circuit in a micromachine determines the motion of each actuator. We obtained the following resuts :(l)We studied the control logic of the micromachine for the positioning and orientating task. The task should be completed by the gr … More oup work of microactuators that are controlled individually by the control logic. We extended two-dimensional cellular automata to handle sensor input and information obtained from neighboring micromachines and adapted them as the controller. The control rules were optimized by evolutionary algorithm ; selection of better rules depended on the simulated performance of each rule. The simulation model included dynamics of object motion and friction. Rules that were capable of positioning and orientating an object evolved in less than 100 generations.(2)We also designed the control circuits for a sorting task. The system recognizes objects with different shapes and conveys them in different directions according to their shapes. Its subsystems, such as arrayed actuators, a distributed logic for shape recognition and a high-voltage driver for actuators were fabricated and operated. The system integration of those subsystems is underway.(3)We developed hybrid integration technologies of chips with electronic circuits and chips with micromachined sensors and actuators. The technologies allow us to fabricate both chips separately and to increase the yield One method is called a silicon motherboard technology. The one edge of each chip is machined into micro connectors by deep dry etching. Chips are inserted into receptors that are machined in a bigger chip, the motherboard. Another technology is a stacking integration using micro holes through the chip. We confirmed adequate electrical and mechanical interconnection between the electric chip and the micromachine chip through the holes. Less