Biologically-Inspired Machines Composed of Many Integrated Micromachines

生物系统和器官由许多简单的元素组成，通过协调元素的行为来执行复杂的功能。纤毛和由limphocites组成的免疫系统就是这样的例子。受生物系统的启发，我们研究了由许多微机械组成的机械系统的分布式结构。调查的重点是制造和分散控制这样的机器。微机械元件具有传感器、致动器和电子电路，所有这些都集成在一起。我们选择了一个智能细胞输送机作为研究对象。排列在平面基板上的微致动器在其上传送物体。基于来自其自身和周围微机械的传感器的信息，微机械中的控制电路确定每个致动器的运动。（1）研究了微机械定位定向任务的控制逻辑。这项任务应该由gr完成 关于我们 由控制逻辑单独控制的微致动器的工作。我们扩展了二维元胞自动机来处理传感器输入和从相邻微机器获得的信息，并将其作为控制器。采用进化算法对控制规则进行优化，根据各规则的仿真性能选择较优的控制规则。仿真模型包括物体运动和摩擦的动力学。能够定位和定向物体的规则在不到100代的时间里进化而来。(2)We并设计了分拣任务的控制电路。该系统识别具有不同形状的物体，并根据它们的形状将它们传送到不同的方向。其子系统，如阵列致动器，分布式逻辑的形状识别和高压驱动器的致动器的制造和操作。这些子系统的系统集成正在进行中。(3)We开发了芯片与电子电路以及芯片与微机械传感器和执行器的混合集成技术。这些技术使我们能够分别制造两个芯片，并提高产量。一种方法被称为硅主板技术。每个芯片的一个边缘通过深干法蚀刻加工成微型连接器。芯片被插入到一个更大的芯片，主板加工的受体。另一种技术是使用穿过芯片的微孔的堆叠集成。我们确认了通过孔在电子芯片和微机械芯片之间的足够的电气和机械互连。少

Biological systems and organs, which are composed of many simple elements, perform complicated functions by coordinating the behavior of elements. Cilia and the immune system composed of limphocites are such examples. Inspired by biological systems, we have investigated the distributed architecture of mechanical systems composed of many micromachines. The investigation focused in fabrication and decentralized control of such machines. The micromachine element has sensors, actuators and electronic circuits, all integrated together. We selected an intelligent cellular conveyor as the research target. Micro actuators arrayed on a planar substrate convey objects on them. Based on the information from sensors of its own and surrounding micromachines, the control circuit in a micromachine determines the motion of each actuator. We obtained the following resuts :(l)We studied the control logic of the micromachine for the positioning and orientating task. The task should be completed by the gr … More oup work of microactuators that are controlled individually by the control logic. We extended two-dimensional cellular automata to handle sensor input and information obtained from neighboring micromachines and adapted them as the controller. The control rules were optimized by evolutionary algorithm ; selection of better rules depended on the simulated performance of each rule. The simulation model included dynamics of object motion and friction. Rules that were capable of positioning and orientating an object evolved in less than 100 generations.(2)We also designed the control circuits for a sorting task. The system recognizes objects with different shapes and conveys them in different directions according to their shapes. Its subsystems, such as arrayed actuators, a distributed logic for shape recognition and a high-voltage driver for actuators were fabricated and operated. The system integration of those subsystems is underway.(3)We developed hybrid integration technologies of chips with electronic circuits and chips with micromachined sensors and actuators. The technologies allow us to fabricate both chips separately and to increase the yield One method is called a silicon motherboard technology. The one edge of each chip is machined into micro connectors by deep dry etching. Chips are inserted into receptors that are machined in a bigger chip, the motherboard. Another technology is a stacking integration using micro holes through the chip. We confirmed adequate electrical and mechanical interconnection between the electric chip and the micromachine chip through the holes. Less