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Levitational and Vacuum-Compatible Micro Conveyer Utilizing the Meissner Effect of Ceramic Superconductor

利用陶瓷超导体迈斯纳效应的悬浮真空兼容微型输送机

基本信息

批准号：
03555049
负责人：
FUJITA Hiroyuki
金额：
$ 8.83万
依托单位：
The University of Tokyo
依托单位国家：
日本
项目类别：
Grant-in-Aid for Developmental Scientific Research (B)
财政年份：
1991
资助国家：
日本
起止时间：
1991 至 1992
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-03555049/
关键词：
Micromachine Vacuum Environment Superconductivity Meissner Effect Flux Pinning Magnetic Levitation

项目摘要

The purpose of this research is develop a micro miniature device to levitate and carry a small object in vacuum environment. The stable levitation without active control was achieved by using the repulsive force between a superconductor and a permanent magnet. One possible application of the device is the wafer conveyer in a clustered vacuum apparatus for semiconductor IC fabrication. Contamination by particles generated in sliding surfaces can be avoided by the non-contact movement with levitation. Furthermore friction force which is dominant in micromachines can also be eliminated by levitation. Miniaturization of the devices was achieved by using micromaching processes. Following results are obtained:(1) We designed the levitational actuator which was composed of a slider with permanent magnets, a superconductor for repulsive force, and line electrodes on the superconductor for carrying current to drive the slider. Therefore the device was the combination of both the magnetic repuls … More ive suspension and the linear synchronous stepping-motor. Through the optimal arrangement of permanent magnets and driving electrodes, we obtained the maximum levitation force and driving force while having enough accuracy in positioning. The repulsive force and the drag force acting between different kinds of superconductors and the magnet were determined experimentally; the result suggested a Y-based ceramic superconductor was most suitable to this device.(2) In order to achieve X-Y two directional movement, we have two sets of line electrodes on insulation films and placed them orthogonally on the superconductor. The pitch of the lines was 0.18 mm. The slider had four magnets of 1 mm cub. The superconductor was cooled by closed loop cooling set-up for vacuum environment. Driving experiments were successfully carried out in the vacuum. With currents over 500 mA, the slider moved step by step; one step was 0.18 mm. Two-degree-of -freedom movement was confirmed. Instantaneous speed of the slider was 33 m/s and the settling time for a step was 20 ms.(3) From the above experiment it was concluded that the device cleared basic requirements for a conveyer in vacuum apparatus. Less

本研究的目的是研制一种在真空环境中实现微小物体漂浮和搬运的微型装置。利用超导体与永磁体之间的排斥力，实现了无主动控制的稳定悬浮。该装置的一个可能的应用是用于半导体IC制造的集群式真空设备中的晶片输送。通过悬浮的非接触运动，可以避免滑动表面产生的颗粒污染。此外，悬浮还可以消除在微型机械中占主导地位的摩擦力。利用微机械加工工艺实现了器件的小型化。主要研究成果如下：(1)设计了由带永磁体的滑块、斥力超导体和载流线电极组成的悬浮驱动器。因此，该装置是磁斥力…的组合更多的悬架和直线同步步进电机。通过对永磁体和驱动电极的优化布置，在保证定位精度的前提下，获得了最大的悬浮力和驱动力。实验测定了不同类型的超导体与磁体之间的排斥力和阻力，结果表明Y基陶瓷超导体最适合于这种装置。(2)为了实现X-Y双向运动，我们在绝缘膜上放置了两组线电极，并将它们垂直放置在超导体上。线条的间距为0.18 mm。滑块上有四块磁铁，大小为1毫米。利用真空环境下的闭路冷却装置对超导体进行冷却。在真空中成功地进行了驱动实验。当电流大于500 mA时，滑块逐级移动，每一步移动0.18 mm。确定了两自由度运动。滑块的瞬时速度为33m/S，每一步的稳定时间为20ms。(3)从以上实验可以看出，该装置满足了真空装置对输送机的基本要求。较少