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Levitational and Vacuum-Compatible Micro Conveyer Utilizing the Meissner Effect of Ceramic Superconductor

利用陶瓷超导体迈斯纳效应的悬浮真空兼容微型输送机

基本信息

批准号：
03555049
负责人：
FUJITA Hiroyuki
金额：
$ 8.83万
依托单位：
The University of Tokyo
依托单位国家：
日本
项目类别：
Grant-in-Aid for Developmental Scientific Research (B)
财政年份：
1991
资助国家：
日本
起止时间：
1991 至 1992
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-03555049/
关键词：
Micromachine Vacuum Environment Superconductivity Meissner Effect Flux Pinning Magnetic Levitation

项目摘要

The purpose of this research is develop a micro miniature device to levitate and carry a small object in vacuum environment. The stable levitation without active control was achieved by using the repulsive force between a superconductor and a permanent magnet. One possible application of the device is the wafer conveyer in a clustered vacuum apparatus for semiconductor IC fabrication. Contamination by particles generated in sliding surfaces can be avoided by the non-contact movement with levitation. Furthermore friction force which is dominant in micromachines can also be eliminated by levitation. Miniaturization of the devices was achieved by using micromaching processes. Following results are obtained:(1) We designed the levitational actuator which was composed of a slider with permanent magnets, a superconductor for repulsive force, and line electrodes on the superconductor for carrying current to drive the slider. Therefore the device was the combination of both the magnetic repuls … More ive suspension and the linear synchronous stepping-motor. Through the optimal arrangement of permanent magnets and driving electrodes, we obtained the maximum levitation force and driving force while having enough accuracy in positioning. The repulsive force and the drag force acting between different kinds of superconductors and the magnet were determined experimentally; the result suggested a Y-based ceramic superconductor was most suitable to this device.(2) In order to achieve X-Y two directional movement, we have two sets of line electrodes on insulation films and placed them orthogonally on the superconductor. The pitch of the lines was 0.18 mm. The slider had four magnets of 1 mm cub. The superconductor was cooled by closed loop cooling set-up for vacuum environment. Driving experiments were successfully carried out in the vacuum. With currents over 500 mA, the slider moved step by step; one step was 0.18 mm. Two-degree-of -freedom movement was confirmed. Instantaneous speed of the slider was 33 m/s and the settling time for a step was 20 ms.(3) From the above experiment it was concluded that the device cleared basic requirements for a conveyer in vacuum apparatus. Less

本研究的目的是开发一种微型装置，用于在真空环境中悬浮和携带小物体。利用超导体和永磁体之间的排斥力实现了无需主动控制的稳定悬浮。该设备的一种可能的应用是用于半导体 IC 制造的集群真空设备中的晶圆传送机。通过非接触式悬浮运动可以避免滑动表面产生的颗粒污染。此外，在微型机械中占主导地位的摩擦力也可以通过悬浮消除。通过使用微机械加工工艺实现了设备的小型化。获得以下结果：(1)我们设计了悬浮致动器，该悬浮致动器由带有永磁体的滑块、用于产生排斥力的超导体以及超导体上用于承载电流驱动滑块的线电极组成。因此，该装置是磁斥悬浮和线性同步步进电机的组合。通过永磁体和驱动电极的优化布置，我们获得了最大的悬浮力和驱动力，同时具有足够的定位精度。实验测定了不同种类超导体与磁体之间作用的斥力和曳力；结果表明Y基陶瓷超导体最适合该装置。(2)为了实现X-Y两个方向的运动，我们在绝缘薄膜上设置了两组线电极并将它们正交地放置在超导体上。线的间距为0.18毫米。滑块有四个 1 毫米立方体的磁铁。超导体通过真空环境的闭环冷却装置进行冷却。在真空中成功进行了驱动实验。电流超过500mA时，滑块逐步移动；一步是0.18毫米。确认了二自由度运动。滑块的瞬时速度为33m/s，一步的稳定时间为20ms。(3)从上述实验得出结论，该装置满足了真空设备中输送机的基本要求。较少的