Nano Mechanical Characterization Method by MEMS Devices and In-situ TEM Observation and its Applications

我们利用半导体器件的微纳加工技术制作了一种MEMS器件，并在透射电子显微镜(TEM)中进行了操作。我们的实验装置能够在纳米尺度上测量纳米物体在外力作用下的变形过程、在固体界面上的扩散、原子在电场中的输运、电导率和热传递。我们的实验结果与计算机分析结果的比较，如分子动力学和从头算碱模拟，阐明了纳米尺度现象的微观机制。这种对微观机制的理解将有助于解决与实际应用相关的问题，如微电子的有效冷却、扩散焊接技术、电子线路中位错运动引起的电噪声、电接触的退化以及纳米摩擦学。

We fabricated a MEMS device using the micro-nano fabrication technology of semiconductor devices and operated it in a transmission electron microscope (TEM). Our experimental setup enabled to measure the deformation process of a nano object due to the external force, the diffusion across the solid interface, atomic transport by electric field, the electrical conductivity and the heat transfer at the nano-scale. The comparison between our experimental results and computer analysis, such as molecular dynamics and ab-initio base simulation have elucidated microscopic mechanisms of nano scaled phenomena. Such understanding of the microscopic mechanisms will help solving problems associated with practical applications, such as efficient cooling in microelectronics, diffusion bonding technology, electrical noise due to the motion of dislocations in the electric wiring, degradation of the electrical contact, and nano-tribology.