Microactuators Integrated with Force Transmission Mechanisms which are Suitable in Microscopic Scales

与适用于微观尺度的力传输机构集成的微执行器

• 批准号: 04452161
• 负责人: FUJITA Hiroyuki
• 金额: $ 4.61万
• 依托单位: University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (B)
• 财政年份: 1992
• 资助国家: 日本
• 起止时间: 1992 至 1993
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-04452161/
• 关键词: Microactuator; Silicon; Micrio Fabrication; Micromachining; Elastic Suspension; Force Transmission; 静動; シリコン薄膜; 弾性変形

The purpose of this research is to integrate force and displacement mechanisms with mu m-size actuators(microactuators)by IC-based micromachining technology. Microactuators have many opportunities in fine mechatromics such as information machinery and medical assistance equipments. However, the lack of mechanisms which transmit the output of actuators has prohibited the wide utilization. Mere miniaturization of links and gears which are used for transmission in macroscopic scales does not work because frictional force tends to overwhelm driving force in microscopic scales. In order to solve the friction problem, flexible structures suspended above a substrate are used for transmission mechanisms in this research. Part of the structures is pulled by electrostatic force and the displacement and force are transmitted to other part through elastic deformation. We have fabricated a device shown in the SEM photograph ; two opposing vertices of a prallerogram structure is driven by palarrel-plate electrostatic actuators, one vertice is fixed, and the remaining vertce moves in 90ﾟ obligue direction to original motion for external force/displacement output. Force and displacement can be traded by chauging the corner angle rheta of the parallerogram. Optimal design of flexible structures has also studied using other configuration.

本研究的目的是利用集成电路微机械加工技术，将力与位移机构与微米尺寸的驱动器（微驱动器）整合在一起。微驱动器在信息机械、医疗辅助设备等精细机械领域有着广阔的应用前景。然而，缺乏传递致动器的输出的机构已经阻止了广泛的应用。在宏观尺度上用于传动的连杆和齿轮仅仅小型化是行不通的，因为在微观尺度上摩擦力往往压倒驱动力。为了解决摩擦问题，本研究采用悬浮于基板上方的柔性结构作为传动机构。结构的一部分受到静电力的牵引，而静电力和位移通过弹性变形传递给结构的另一部分。我们已经制作了一个装置中所示的SEM照片;一个prallerogram结构的两个相对的顶点是由palarrel-plate静电驱动器驱动，一个顶点是固定的，和其余的顶点在90 °斜向的方向上移动到原始运动的外力/位移输出。力和位移可以通过改变平行四边形的转角来交换。本文还研究了柔性结构在其它构形下的优化设计。

项目成果

T.Furuhata, T.Hirano, K.J.Gabriel, H.Fujita: ""Electrostaric Comb-drive Microactuators with Sub-micron Gaps"" Transaction on IEEJ(A). vol.112. 999-1006 (1992)

T.Furuhata、T.Hirano、K.J.Gabriel、H.Fujita：“具有亚微米间隙的电动梳状驱动微执行器”，IEEJ(A) 上的交易。

N.Takeshima,K.J.Gabriel,M.Ozaki,J.TakahasHi,H.Horiguchi,H.Fujita: "Electrostatic Parallelogram Actuators" TRANSDUCERS ′91. (1991)

N.Takeshima、K.J.Gabriel、M.Ozaki、J.TakahasHi、H.Horiguchi、H.Fujita：“静电平行四边形执行器”TRANSDUCERS 91 (1991)。

古畑、平野、Gabriel、藤田: "サブミクロンギャップを有する 櫛形静電マイクロアクチュエータ" 電気学会論文誌A. 112. 999-1006 (1992)

Furuhata、Hirano、Gabriel、Fujita：“具有亚微米间隙的梳状静电微致动器”IEEJ Transactions A. 112. 999-1006 (1992)

T.Hirano, T.Furuhata, K.J.Gabriel, H.Fujita: ""Design, Fabrication, and Operation of Submicron Gap Comb-drive Microactuators"" IEEE/ASME Jour.of Microelectromechanical Systems. vol.1. 52-59 (1992)

T.Hirano、T.Furuhata、K.J.Gabriel、H.Fujita：“亚微米间隙梳状驱动微执行器的设计、制造和操作”IEEE/ASME Jour.of 微机电系统。

竹島 尚弘、小林 大、藤田 博之: "分散型マイクロ運動システムの提案" 平成3年電気学会全国大会.

Naohiro Takeshima、Dai Kobayashi、Hiroyuki Fujita：“分布式微运动系统的提案”1991 年日本电气工程师学会全国会议。