A Micromachined and Integrated Tunneling Control Unit and Its Application

微机械一体化隧道控制装置及其应用

基本信息

批准号：
07455042
负责人：
FUJITA Hiroyuki
金额：
$ 4.86万
依托单位：
The University of Tokyo
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
1995
资助国家：
日本
起止时间：
1995 至 1996
项目状态：
已结题

项目摘要

We developed a micro fabricated tunneling unit, a device which can control the magnitude of a tunneling current that passes through a vacuum gap by adjusting the gap diostance with a microactuator. Since the unit has a tunneling tip in the direction lateral to the substrate, we call it a lateral tunneling unit(LTU). The LTU was fabricated by IC-compatible surface micromaching process ; it occupies only 0.5mm*0.5mm in area. Because of its layout and fabrication process, the LUT is suitable for intergrating with each other or with other microstructures on a single substrate. This paper describes the design, the fabrication, and an experimental result which shows LTU's ability to control tunneling current.The LTU was successfully applied to mimute displacement detection. An LTU has a tunneling tip protruding from the chip edge and can be moved back and forth by a microactuator. The tip end was positionea crose to a pranar electrode attached to a PZT actuator. When the PZT actuator moved, the gap between the tip and the opposing electrode was kept constant by moving the tip so that the tunneling current flows through the gap should be constant. The displacement of the planar electrode was determined from the change in the microactuator's driving voltage. Possible applications of displacement detection based on LUT include detection of displacement of the prof-mass of an accelerometer or an AFM cantilever. Arrays of LUT could be used in date-storage devices based on SPM(scanning probe microscopes).

我们开发了一个微型制造的隧道单元，该设备可以控制通过使用微驱动器调节间隙屈光度通过真空间隙的隧道电流的大小。由于该单元的隧道尖端朝向基材的侧向，因此我们称其为侧向隧道单元（LTU）。 LTU是通过IC兼容的表面微压工艺制造的。它的面积仅占0.5mm*0.5mm。由于其布局和制造过程，LUT适用于彼此或单个基板上的其他微观结构。本文描述了设计，制造和实验结果，该结果表明LTU控制隧道电流的能力。LTU成功地应用于模拟位移检测。 LTU具有从芯片边缘伸出的隧道尖端，可以通过微型驱动器来回移动。尖端端是位于PZT执行器上附着的pranar电极上的位置。当PZT执行器移动时，通过移动尖端来保持尖端和相对电极之间的间隙保持恒定，以使隧道电流流过间隙。平面电极的位移是根据微驱动器驱动电压的变化确定的。基于LUT的位移检测的可能应用包括检测加速度计或AFM悬臂的位移的位移。 LUT阵列可用于基于SPM（扫描探针显微镜）的日期存储设备。