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A Micromachined and Integrated Tunneling Control Unit and Its Application

微机械一体化隧道控制装置及其应用

基本信息

批准号：
07455042
负责人：
FUJITA Hiroyuki
金额：
$ 4.86万
依托单位：
The University of Tokyo
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
1995
资助国家：
日本
起止时间：
1995 至 1996
项目状态：
已结题

项目摘要

We developed a micro fabricated tunneling unit, a device which can control the magnitude of a tunneling current that passes through a vacuum gap by adjusting the gap diostance with a microactuator. Since the unit has a tunneling tip in the direction lateral to the substrate, we call it a lateral tunneling unit(LTU). The LTU was fabricated by IC-compatible surface micromaching process ; it occupies only 0.5mm*0.5mm in area. Because of its layout and fabrication process, the LUT is suitable for intergrating with each other or with other microstructures on a single substrate. This paper describes the design, the fabrication, and an experimental result which shows LTU's ability to control tunneling current.The LTU was successfully applied to mimute displacement detection. An LTU has a tunneling tip protruding from the chip edge and can be moved back and forth by a microactuator. The tip end was positionea crose to a pranar electrode attached to a PZT actuator. When the PZT actuator moved, the gap between the tip and the opposing electrode was kept constant by moving the tip so that the tunneling current flows through the gap should be constant. The displacement of the planar electrode was determined from the change in the microactuator's driving voltage. Possible applications of displacement detection based on LUT include detection of displacement of the prof-mass of an accelerometer or an AFM cantilever. Arrays of LUT could be used in date-storage devices based on SPM(scanning probe microscopes).

我们研制了一种微加工隧穿单元，它可以通过微致动器调节真空间隙的差距距离来控制穿过间隙的隧穿电流的大小。由于该单元在衬底的横向方向上具有隧穿尖端，我们称之为横向隧穿单元（LTU）。LTU采用IC兼容表面微机械加工工艺制作，面积仅为0.5mm*0.5mm。由于其布局和制造工艺，LUT适合于在单个衬底上彼此集成或与其他微结构集成。本文介绍了LTU的设计、制作和实验结果，实验结果表明LTU具有控制隧道电流的能力，并成功地应用于微小位移的检测。LTU具有从芯片边缘突出的隧道尖端，并且可以通过微致动器来回移动。尖端被定位成与连接到PZT致动器的平面电极交叉。当PZT致动器移动时，通过移动尖端来保持尖端和相对电极之间的差距恒定，使得流过差距的隧穿电流应该恒定。平面电极的位移由微致动器的驱动电压的变化确定。基于LUT的位移检测的可能应用包括检测加速度计或AFM悬臂的前质量的位移。查找表阵列可用于基于扫描探针显微镜的数据存储器件。