权益分类	功能权益	普通用户	{{item.name}}会员
{{category.name}}	{{benefitItem.name}}

Development of Ultra Precision Fine EDM Device for Micro Machining

微细加工用超精密电火花加工装置的开发

基本信息

批准号：
07555367
负责人：
UNO Yoshiyuki
金额：
$ 1.73万
依托单位：
OKAYAMA UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
1995
资助国家：
日本
起止时间：
1995 至 1997
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07555367/
关键词：
micro machining ultra precision machining EDM machine fine electrode irregular shape complicated polygon shape fine positioning corner radius 星形形状位置決め放電加工単結晶シリコン

项目摘要

This study has done for 3 years from Apr.1995 to Mar.1998 in order to develop a ultra precision fine electric discharge machining device for micro machining. In the first year, we tried to make a ultra precision fine EDM machine, and completed the machine with condenser circuit which was suitable for fine micro machining. In the second year, a new method for high efficiency machining of complicated shape using simple electrode was proposed, and the the extrusion method for long fine electrode with a right angled equilateral triangle was developed. Silver is used as the material of electrode because of the easiness of extrusion and the performance of EDM.In the third year, some kinds of machining of complicated shapes are tried with the shaped electrode made by extrusion. First the relationship between the machining result and the machining condition was investigated by simple piercing experiment. Next, machinings of some polygon shapes, star shape and letter were tried by combining the right angled triangles. In the method, the coordinates were arranged under the microscope, which led to the precision micro machining. Then, the reduction method of corner radius was proposed, because it was impossible to make the corner radius so small. It was clarified that the corner radius could be reduced to 10-25micron by the reverse EDM.The method to make the corner angle less than 45 degrees was also investigated and it was shown that it was possible by the same reverse EDM method. Furthermore, the machining of cavity was tried, and it was shown to be possible. Lastly, the micro machining of single crystalline silicon was investigated. it was proved that silicon could be machined like the stainless steel, and it was shown that this method was effective for micro machining of micro sensors and actuators made of single crystalline silicon.

本课题从1995年4月到1998年3月进行了3年的研究，旨在研制一种用于微细加工的超精密微细电火花加工装置。第一年，我们试制了一台超精密精密电火花加工机床，并完成了适合于精细微加工的带电容电路的机床。第二年，提出了用简单电极高效加工复杂形状的新方法，并发展了直角正三角形细长电极的挤压加工方法。由于挤压的易用性和电火花加工的性能，采用银作为电极材料。第三年，用挤压成形的电极进行了各种复杂形状的加工。首先，通过简单的冲孔实验，研究了加工结果与加工条件的关系。然后，通过组合直角三角形，尝试加工一些多边形、星形和字母。该方法将坐标安排在显微镜下，实现了精密微加工。然后，由于不可能将拐角半径缩小到如此之小，因此提出了拐角半径的简化方法。结果表明，反向电火花加工可以将转角半径减小到10-25微米，并研究了使转角小于45度的方法，证明了同样的反向电火花加工方法也是可行的。此外，还对型腔的加工进行了试验，结果表明是可行的。最后，对单晶硅的微细加工进行了研究。实验证明，硅可以像不锈钢一样被加工，并且这种方法对于单晶硅制造的微型传感器和执行器的微加工是有效的。