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Study on Short-Wavelength Soft X-Ray Phase Contrast Microscope

短波长软X射线相衬显微镜的研究

基本信息

批准号：
08405010
负责人：
AOKI Sadao
金额：
$ 27.14万
依托单位：
University of Tsukuba
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
1996
资助国家：
日本
起止时间：
1996 至 1998
项目状态：
已结题

项目摘要

1) Development of a phase contrast x-ray microscopeWe developed the first Zernike phase-contrast x-ray microscope with a phase plate. Synchrotron radiation from the bending magnet beamline BL3C2 at the Photon Factory, Institute for High Energy Physics was used. Monochromatic x-rays at 9keV were incident on a specimen. Using a Wolter mirror, the transmission image was enlarged with the magnification ratio of 10. The microscope could image only one-dimensional direction, because the small part of the annular aperture of the mirror was used, and the figure error of the mirror was severely affected to the meridional direction. A phase plate of an aluminum foil of a 5mum thickness was set at the back focal plane of the Wolter mirror. A phase-contrast image of poly(ethylene telephthalate) wires of a 5-10mum diameter was clearly focused at 9keV, that could not be observed in the case of bright field.2) Development of a dark-field soft x-ray microscopeWe developed the first dark-field soft x-ray microscope with Wolter mirrors. Soft x-rays from a laser-produced plasma source were focused with a condenser mirror with the slightly small annular aperture of an objective mirror. Scattering soft x-rays from a specimen were focused on a CCD camera. Edge-enhanced dark-field images of a PMMA pattern and biological specimens could be observed.3) Fabrication of a Wolter mirrorMirror mandrels of oxygen-free copper were turned with a NC lathe and a diamond single-point tool. The surface roughness was about Rq (rms) 9nm. Then, the Pyrex glass replicas were fabricated. The surface roughness of the mirrors was about Rq (rms) 20-30nm, This process of a Wolter mirror fabrication would shorten a fabrication term of a Wolter mirror however the surface roughness was not small enough for soft x-rays and x-rays, and it was necessary to polish a mandrel and a replicated glass replica.

1)相衬X射线显微镜的研制我们研制了第一台带相位板的Zernike相衬X射线显微镜。使用来自高能物理研究所光子工厂的偏转磁体束线BL 3C 2的同步加速器辐射。将9 keV的单色X射线入射到样本上。使用Wolter镜，以10的放大率放大透射图像。该显微镜只能对一维方向成像，由于其环形孔径的小部分被利用，使得镜面形误差严重影响到二维方向。将5 μ m厚的铝箔的相位板设置在Wolter镜的后焦平面处。在9 keV的能量下，对直径为5- 10 μ m的聚对苯二甲酸乙二酯（PET）丝的相衬图像进行了清晰的聚焦，这在明场情况下是无法观察到的。2）暗场软X射线显微镜的研制我们研制了第一台带Wolter镜的暗场软X射线显微镜。来自激光产生的等离子体源的软X射线用具有物镜的稍小环形孔径的聚光镜聚焦。将来自样本的散射软X射线聚焦在CCD相机上。PMMA图案和生物样品的边缘增强暗场图像可以被再现。3）Wolter镜的制造用NC车床和金刚石单点工具车削无氧铜的镜芯轴。表面粗糙度约为Rq（rms）9 nm。然后，Pyrex玻璃复制品制造。镜的表面粗糙度约为Rq（rms）20- 30 nm。这种Wolter镜制造工艺将缩短Wolter镜的制造期限，然而表面粗糙度对于软X射线和X射线来说不够小，并且需要抛光芯轴和复制的玻璃复制品。