Real tine characterization and control of growing interface structures of thin films

1.实时X射线光电子衍射仪(XPED)为实现XPED对界面结构、反应和生长的实时测量，对XPED-MBE室进行了改进。新的机械手和传送杆系统使XPED测量能够在77K到约1300K的范围内精确旋转。研究界面结构的新理论的发展；张量XPED和光电子全息为了精确地研究界面结构，发展了张量XPED和光电子全息的新理论。利用这些方案，研究了Cu/Ge(111)体系的XPED理论花样。用X射线光电子衍射(XPED)研究了Ge(111)-c(2×8)表面非公度磁畴铜层的结构。结果表明，在外延初期，铜在非公度区形成双层结构，最外层的铜层发生0.6Å弛豫。研究了铜层和锗层界面上合金的形成。用于界面反应测量的XPED实时检测系统的设计和仪器为了准确和实时地研究界面反应，传统的逐点XPED测量是不够的。为此，本文对极角和能量分布的二维同时探测进行了理论和实验研究。对新型高通量输入透镜系统进行了理论设计。

1. Instrumentation of real time X-ray Photoelectron Diffraction (XPED) AnalysisFor real time measurements of interface structures, reactions and growth by XPED, the improvement of our XPED-MBE chamber was carried out. The new manipulator and transfer rods system enables the XPED measurements at from 77K to about 1300K with the precise rotation.2. Development of novel theory to investigate interface structures ; Tensor XPED and Photoelectron HolographyTo investigate interface structures precisely, novel theory of tensor XPED and Photoelectron Holography were developed. Using these schemes, theoretical XPED patterns of Cu/Ge (111) systems were investigated.3. Interface structure of Cu/Ge (111) systems (Interface structure and alloy formation of discommensurate system)The structure of discommensurate domain Cu Layer on Ge (111)-c (2x8) surface was studied by X-ray Photoelectron Diffraction (XPED). It turned out that Cu forms the double layer structure in the discommensurate domain at the initial stage of epitaxy and 0.6Å relaxation of outermost Cu layer occurs. Alloy formation in the interface between Cu an Ge layers was also investigate.4. Design and Instrumentation of real time XPED detection systems for measurements of interface reactionTo investigate interface reactions precisely and real time, conventional plot-by-plot XPED measurements is not adequate. Thus, theoretical and experimental study on 2 dimensional simultaneous detection of the polar angle and energy distributions was performed. Theoretical design of new type input lens system with a high through put was also carried out.