Development of Three-Dimensional Microanalysis usig Ion and Electron Dual Focused Beams

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We devised two noble microanalysis techniques using ion and electron dual focused beams. The main target of our microanalysis is single microparticle or microstrucuture of IC.Another target of this study is concerned with the fundamentals of ion-solid interactions.1) Three-dimensional microanalysisIn this method, a focused ion beam (FIB) is used as a cross-sectioning tool. Another focused beam, an electron beam (EB) is used for scanning Auger microscopy measurements on the cross-sections.2) Electron beam post-ionization in FIB-SIMSAnother product of the combination of the FIB and FB is a new method of the postionization of sputtered neutrals using the simultaneous bombardment of the FIB and EB.The aim of this method is the improvement of sensitivities and quantifications in FIB-SIMS analysis.In order to realize the two analysis methods, we developed an ion and electron dual focused beam apparatus. The main feature of the apparatus is the simultaneous control of the FIB and EB.Using the apparatus, the precise cross-sectioning of single particle for three-dimensional analysis was performed. As for the post-ionization method, the capability of the simultaneous bombardment was realized by using the scan controller with the fine adjustment function of the beam positioning.3)FIB-induced Auger election spectroscopy and elemental mappingWe measured FIB-induced Auger electron spectrum for the first time. The spectrum showed good P/B ratios which were enough not only for spectroscopic measurements but elemental mapping. As a result, we obtained a high resolution elemental map using an FIB-induced Al _<LMM> Auger peak. This result provided a new use of an FIB for microanalysis.