Development of nano-scale three-dimensional analytical apparatus for industrial material using an ultra fine focused ion beam

在这个项目中，我们尝试了分析技术和仪器的发展，进行纳米尺度的三维分析。为此，需要制定并明确以下几项内容；(1)研制了直径为几纳米的超细离子束（主离子束）；(2)研制了长时间测量的稳定束扫描技术；(3)研制了高精度的三维分析数据系统；(4)利用镓聚焦离子束（Ga-FIB）阐明了截面的形状和化学成分。利用研制的二次离子质谱仪（SIMS），获得了碳质板上真空蒸发金膜的离子诱导二次电子图像。从这些结果可以明显看出，该系统的横向分辨率小于10 nm。由此可以得出结论：该装置实现了高空间分辨率的三维分析。作为一种破坏性的局部分析，高精度的数据系统对于三维分析是非常重要的。我们已经调查了SIMS分析中不确定性的原因。通过实验计算得出单通道检测系统的不确定度为12.1% ~ 19.1%，即基于磁场再现性和被分析表面随时间变化的复合不确定度。因此，我们得出结论，多元素测量系统提高了分析可靠性12.1% ~ 19.1%。第4项：为了利用Ga-FIB弄清截面形状，对截面过程进行了计算机模拟。仿真结果表明，截面形状与光束直径、电流密度和截面速度有关。我们得出结论，超细离子束对于获得精确的截面是有效的。少

In this project, we tried the development of analytical technique and apparatus, for a nano-scale three-dimensional analysis. For this development, it is needed to develop and make clear the several items as follows ;(1) Development of an ultra fine ion beam (primary ion beam), whose diameter is several nano-meter,(2) Development of a stability beam scanning technique during long time measurements,(3) Development of a high accurate data system for three-dimensional analysis,(4) Clarify the shape and chemical composition of the cross-section by a gallium focused ion beam (Ga-FIB)Items of 1 and 2 : We developed the ultra fine ion beam (primary ion beam) and a stability beam scanning system. By using the developed secondary ion mass spectrometry (SIMS) apparatus, we obtained the ion induced secondary electron image of a vacuum-evaporation gold film on a carbon prate. Judging from these results, it was clear that the lateral resolution of this system was less than 10 nm. Thus, we can concl … More ude that the three-dimensional analysis with high spatial resolution was realized by using this apparatus.Item of 3 : The high accurate data system is very important for the tree-dimensional analysis as a destructive local analysis. We have investigated the cause of an uncertainty in the SIMS analysis. From the experiments, the uncertainty based on a single-channel detection system, which was the composite uncertainty based on the reproducibility of the magnetic field and the changes of the analyzed surface with time, was calculated to be 12.1%〜19.1%. Thus, we conclude that the multi-elements measurement system improves the analytical reliability by 12.1%〜19.1%.Item of 4 : In order to clarify the shape of a cross-section by using a Ga-FIB, the computer simulations of cross-sectioning process were performed. The simulation revealed that the shape depend on a beam diameter and current density, and the cross-sectioning speed. We conclude that an ultra fine ion beam is effective for obtaining the accurate cross-section. Less