Development of nano-scale three-dimensional analytical apparatus for industrial material using an ultra fine focused ion beam

在本计画中，我们尝试发展分析技术与仪器，以进行奈米尺度的三维分析。为此，需要制定并明确以下几项内容：（1）超细离子束的开发（初级离子束），其直径为几纳米，（2）在长时间测量期间开发稳定的束扫描技术，（3）开发用于三维分析的高精度数据系统，（4）通过镓聚焦离子束（Ga-FIB）明确截面形状和化学成分第1项和第2项：开发了超细离子束（初级离子束）和稳定束扫描系统。利用自行研制的二次离子质谱（西姆斯）装置，获得了碳基真空蒸镀金膜的离子感生二次电子像。从这些结果判断，很明显，该系统的横向分辨率小于10 nm。因此，我们可以 关于我们 3.三维分析是一种破坏性的局部分析，高精度的数据系统对三维分析至关重要。我们已经调查了西姆斯分析中不确定性的原因。根据实验，基于单通道检测系统的不确定度（即基于磁场的再现性和分析表面随时间的变化的复合不确定度）计算为12.1%至19.1%。因此，我们得出结论，多元素测量系统提高了12.1%-19.1%的分析可靠性。第4项：为了明确使用Ga-FIB的横截面形状，进行了横截面过程的计算机模拟。模拟结果表明，形状取决于束直径和电流密度，以及横截面的速度。我们的结论是，超细离子束是有效的获得准确的截面。少

In this project, we tried the development of analytical technique and apparatus, for a nano-scale three-dimensional analysis. For this development, it is needed to develop and make clear the several items as follows ;(1) Development of an ultra fine ion beam (primary ion beam), whose diameter is several nano-meter,(2) Development of a stability beam scanning technique during long time measurements,(3) Development of a high accurate data system for three-dimensional analysis,(4) Clarify the shape and chemical composition of the cross-section by a gallium focused ion beam (Ga-FIB)Items of 1 and 2 : We developed the ultra fine ion beam (primary ion beam) and a stability beam scanning system. By using the developed secondary ion mass spectrometry (SIMS) apparatus, we obtained the ion induced secondary electron image of a vacuum-evaporation gold film on a carbon prate. Judging from these results, it was clear that the lateral resolution of this system was less than 10 nm. Thus, we can concl … More ude that the three-dimensional analysis with high spatial resolution was realized by using this apparatus.Item of 3 : The high accurate data system is very important for the tree-dimensional analysis as a destructive local analysis. We have investigated the cause of an uncertainty in the SIMS analysis. From the experiments, the uncertainty based on a single-channel detection system, which was the composite uncertainty based on the reproducibility of the magnetic field and the changes of the analyzed surface with time, was calculated to be 12.1%〜19.1%. Thus, we conclude that the multi-elements measurement system improves the analytical reliability by 12.1%〜19.1%.Item of 4 : In order to clarify the shape of a cross-section by using a Ga-FIB, the computer simulations of cross-sectioning process were performed. The simulation revealed that the shape depend on a beam diameter and current density, and the cross-sectioning speed. We conclude that an ultra fine ion beam is effective for obtaining the accurate cross-section. Less