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Development of Ultrasonic Microspectroscopy for Characterization of Layered and Damaged Surfaces on Single Crystal Substrates

用于表征单晶基底上的层状和损伤表面的超声波显微光谱学的发展

基本信息

批准号：
10555099
负责人：
KUSHIBIKI Jun-ichi
金额：
$ 8.19万
依托单位：
TOHOKU UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
1998
资助国家：
日本
起止时间：
1998 至 1999
项目状态：
已结题

项目摘要

Ultrasonic microspectroscopy technology, using the line-focus-beam (LFB) and plane-wave ultrasonic material characterization system, has been applied to analyze material surface properties introduced by slicing, lapping, and polishing to prepare wafer substrates from single crystal ingots or with very thin layers on the substrates formed by proton-exchanged and ion-implanted methods.1. The reliable LFB system with high accuracy in the velocity measurement of leaky surface-acoustic-waves (LSAWs) on the water-loaded specimen surfaces has been established, operating up to 900 MHz using several LFB ultrasonic devices.2. A method of evaluating material surfaces damaged or roughened by measuring longitudinal-wave reflection coefficients as a function of frequency when the waves are incident normally to the specimen surface through a water couplant has been developed.3. A system of the X-ray diffractometer using the Bond method, combined with a temperature controller to realize highly stabilized measurement environment throughout the whole system, has been developed. The system has been demonstrated with a resolution of better than 【minus-plus】0.0001°, increasing the capability of analyzing single crystal surfaces damaged.4. The following experimental simulations have been conducted using the above-mentioned systems and methods :(1) The LFB system in the measurements of the frequency characteristics of LSAW velocities has been applied to characterize two groups of specimens to demonstrate the high sensitivity and usefulness : five specimens of proton-exchanged layers on Z-cut LiTaOィイD23ィエD2 crystal substrates with the depth of 3-100 nm ; and four specimens ion-implanted layers on (100) Si substrates fabricated with the ion concentrations of 10ィイD113ィエD1-10ィイD116ィエD1 cmィイD11-2ィエD1.(2) The X-ray system has been applied to evaluate the surfaces of several specimens with different levels of roughness to demonstrate the high sensitivity and usefulness.

超声显微光谱技术，使用线聚焦束（LFB）和平面波超声材料表征系统，已被应用于分析材料的表面特性引入切片，研磨，抛光，以制备晶片衬底从单晶锭或非常薄的层上形成的质子交换和离子注入方法. 1.建立了一套高精度、高可靠性的LFB系统，利用多台LFB超声波设备，实现了900 MHz频率的漏声表面波（LSAW）声速测量.提出了一种通过测量声波通过水耦合剂垂直入射到试件表面时声波反射系数随频率的变化来评价材料表面损伤或粗糙度的方法.研制了一种邦德法X射线衍射仪系统，并结合温度控制器，实现了整个系统的高稳定测量环境。该系统已被证明具有优于[-+] 0.0001 °的分辨率，提高了分析单晶表面损伤的能力.（1）利用LFB系统测量了两组样品的声速频率特性，证明了LFB系统的高灵敏度和实用性：5个Z切LiTaO_（23）LiTaO_（23）D_2晶体基片上的质子交换层样品，深度为3 - 100 nm;以及在（100）Si衬底上制备的离子浓度为10 μ mol/L D113 μ mol/L D1 - 10 μ mol/L D116 μ mol/L D1 - 2 μ mol/L D1的四个样品。(2)X射线系统已被应用于评估几个试样的表面具有不同程度的粗糙度，以证明高灵敏度和实用性。