Ultrasonic Microspectroscopy of LiTaO_3 Single Crystals for Optoelectronic Devices

光电器件用LiTaO_3单晶的超声显微光谱

• 批准号: 07555408
• 负责人: KUSHIBIKI Jun-ichi
• 金额: $ 3.14万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 1995
• 资助国家: 日本
• 起止时间: 1995 至 1997
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07555408/
• 关键词: Ultrasonic microspectroscopy; Line-focus-beam acoustic microscopy; V (z) curve analysis; Leaky surfase acoustic wave velocity; Electronic materials; Optoelectronic materials; LiTaO_3; Material characterzation; V (z)曲線解析法

Ultrasonic microspectroscopy technology, especially using the line-focus-beam (LFB) acoustic microscopy system, is very useful and unique for quantitative material characterization by measuring the velocity of leaky surface acoustic waves (LSAWs) , excited on the water-loaded specimen, through V (z) curve analysis. This system has been applied to material problems in the scientific and industrial fields of LiTaO_3 crystals for establishment of the crystal growth conditions and for evaluation of the optoelectronic device fabrication processes such as proton-exchanged and domain-inversion layrs.1.The reliable LFB system with high measurement accuracy in LSAW velocity has been established, resulting in the absolute accuracy within(]SY.+-。[)0.01% and the relative accuracy within(]SY.+-。[)0.001%.2.Three LiTaO_3 crystals of 3-inch-diameter, grown with the different compositions of the starting materials of 48,48.5,49 Li_2O-mol%, have been employed for velocity measurements. It has been shown … More that the velocities on the three basic crystal surfaces of X-, Y-, and Z-cut planes increase for all the surfaces and all the propagation directions monotonically as the Li_2O concentration increases, and the corresponding density decrease monotonically.3.The measured LSAW velocities have been compared with the measured, Curie temperatures, chemical composition, and densities. It has been shown that the LFB system has a much greater sensitivity and resolution in the determination of chemical composition than any other conventional methods such as differential thermal analysis (DTA) , X-ray fluorescence anlysis (XRF) and inductively coupled plasma-atomic emission spectrometry (ICP-AES) .4.Acoustic homogeneity of an optical-grade congruent LiTaO_3 single crystal with 4-inch diameter has been evaluated by LSAW velocity distributions. The velocities have increased by 0.45 m/s, corresponding to the chemical composition change of +0.015 Li_2O-mol%, along the crystal length of 60mm.5.The system has been applied to characterization of proton-exchanged and domain-inverted layrs fabricated on Z-cut LiTaO_3 substrates. It has been demonstrated that the system has the capability to resolve the change of diffusion depth of 1 nm for the proton-exchanged layr and the change of the domain-inverted layr thickness of 1 nm.6.The computer program of numerical calculations of the LSAW propagation characteristics for the layred structures described above has been developed. Less

超声波显微镜的技术，尤其是使用线对焦梁（LFB）声学显微镜系统，非常有用且独特，可通过测量通过V（Z）曲线分析在水上载的样品上测量泄漏的表面声波（LSAW）的速度来定量材料表征。该系统已应用于Litao_3晶体的科学和工业领域的物质问题，用于建立晶体生长条件，并评估光电设备制造过程，例如质子交换和域内的域内层。1。可靠的LFB系统，具有高度测量的LSAW VELOCITY在LSAW VELOCITY中的高度测量精度已在LSAW中的准确性，已建立在LSAW VELOCITY中已建立的绝对精确度已成为您的绝对精确度。在（sy。+ - 。[）0.01％和（] sy.+ - 。[）0.001％.2的内部内部。 It has been shown … More that the velocities on the three basic crystal surfaces of X-, Y-, and Z-cut planes increase for all the surfaces and all the propagation directions monotonically as the Li_2O concentration increases, and the corresponding density decrease monotonically.3.The measured LSAW velocities have been compared with the measured, Curie temperatures, chemical composition, and densities.已经表明，与任何其他常规方法相比，LFB系统在确定化学组成方面具有更大的敏感性和分辨率，例如差分热分析（DTA），X射线荧光分析（XRF）和电感性等离子体的等离子 - 原子发射光谱（ICP-AES）。直径已通过LSAW速度分布进行评估。速度增加了0.45 m/s，对应于+0.015 li_2o-mol％的化学组成变化，沿60mmm.5的晶体长度。该系统已应用于在质子交换和域内融合的Z-Cut Litao_3 subtrates上的质子交换和域融合的Layrs的表征。已经证明，该系统有能力解决质子交换的Layr的扩散深度的变化，并改变了1 nm.6的域融合的Layr厚度的变化。上述铺设结构的LSAW繁殖特性的计算机计算机计算计划。较少的

项目成果

J.Kushibiki and I.Takanaga: ""Elastic properties of single-and multi-domain crystals of LiTaO_3"" J.Appl.Phys. Vol.81 No.10. 6906-6910 (1997)

J.Kushibiki 和 I.Takanaga：“LiTaO_3 单域和多域晶体的弹性性能”J.Appl.Phys。

A.Tourlog, J.D.Achenbach, and J.Kushibiki: ""Line-focus acoustic microscopy measurements of acoustic properties of LiTaO_3 crystal plates with an inversion layr"" J.Appl.Phys.Vol.81 No.10. 6616-6621 (1997)

A.Tourlog、J.D.Achenbach 和 J.Kushibiki：“具有反演层的 LiTaO_3 晶体板的声学特性的线聚焦声学显微镜测量”J.Appl.Phys.Vol.81 No.10。

J.Kushibiki and M.Miyashita: "A Method for Calibrating the Line-Focus-Beam Acoustic Microscopy System" IEEE Trans.Ultaron.,Ferroelect.,Freq.,Contr.,. 45・2. 421-430 (1998)

J.Kushibiki 和 M.Miyashita：“校准线聚焦束声学显微镜系统的方法”IEEE Trans.Ultaron.，Ferroelect.，Freq.，Contr.，421-430 (1998)。

A.Tourlog, J.D.Achenbach, and J.Kushibiki: "Line-focus acoustic microscopy measurements of acoustic properties of LiTaO_3 crystal plates with an inversion layer" J.Appl.Phys.81・10. 6616-6621 (1997)

A.Tourlog、J.D.Achenbach 和 J.Kushibiki：“具有反型层的 LiTaO_3 晶体板的声学特性的线聚焦声学显微镜测量”J.Appl.Phys.81・10 (1997)。

J.Kushibiki and M.Miyashita: "Characterization of Domain-Inverted Layers in LiTaO_3 by Line-Focus-Beam Microscopy" Jpn.J.Appl.Phys.Part 2 Letters. 36・7B. 959-961 (1997)

J.Kushibiki 和 M.Miyashita：“通过线聚焦光束显微镜表征 LiTaO_3 中的畴反转层”Jpn.J.Appl.Phys.Part 2 Letters 36・7B。