Ultrasonic Microspectroscopy of LiTaO_3 Single Crystals for Optoelectronic Devices

光电器件用LiTaO_3单晶的超声显微光谱

• 批准号: 07555408
• 负责人: KUSHIBIKI Jun-ichi
• 金额: $ 3.14万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 1995
• 资助国家: 日本
• 起止时间: 1995 至 1997
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07555408/
• 关键词: Ultrasonic microspectroscopy; Line-focus-beam acoustic microscopy; V (z) curve analysis; Leaky surfase acoustic wave velocity; Electronic materials; Optoelectronic materials; LiTaO_3; Material characterzation; V (z)曲線解析法

Ultrasonic microspectroscopy technology, especially using the line-focus-beam (LFB) acoustic microscopy system, is very useful and unique for quantitative material characterization by measuring the velocity of leaky surface acoustic waves (LSAWs) , excited on the water-loaded specimen, through V (z) curve analysis. This system has been applied to material problems in the scientific and industrial fields of LiTaO_3 crystals for establishment of the crystal growth conditions and for evaluation of the optoelectronic device fabrication processes such as proton-exchanged and domain-inversion layrs.1.The reliable LFB system with high measurement accuracy in LSAW velocity has been established, resulting in the absolute accuracy within(]SY.+-。[)0.01% and the relative accuracy within(]SY.+-。[)0.001%.2.Three LiTaO_3 crystals of 3-inch-diameter, grown with the different compositions of the starting materials of 48,48.5,49 Li_2O-mol%, have been employed for velocity measurements. It has been shown … More that the velocities on the three basic crystal surfaces of X-, Y-, and Z-cut planes increase for all the surfaces and all the propagation directions monotonically as the Li_2O concentration increases, and the corresponding density decrease monotonically.3.The measured LSAW velocities have been compared with the measured, Curie temperatures, chemical composition, and densities. It has been shown that the LFB system has a much greater sensitivity and resolution in the determination of chemical composition than any other conventional methods such as differential thermal analysis (DTA) , X-ray fluorescence anlysis (XRF) and inductively coupled plasma-atomic emission spectrometry (ICP-AES) .4.Acoustic homogeneity of an optical-grade congruent LiTaO_3 single crystal with 4-inch diameter has been evaluated by LSAW velocity distributions. The velocities have increased by 0.45 m/s, corresponding to the chemical composition change of +0.015 Li_2O-mol%, along the crystal length of 60mm.5.The system has been applied to characterization of proton-exchanged and domain-inverted layrs fabricated on Z-cut LiTaO_3 substrates. It has been demonstrated that the system has the capability to resolve the change of diffusion depth of 1 nm for the proton-exchanged layr and the change of the domain-inverted layr thickness of 1 nm.6.The computer program of numerical calculations of the LSAW propagation characteristics for the layred structures described above has been developed. Less

超声显微光谱学技术，特别是线聚焦声束(LFB)声学显微镜系统，通过V(Z)曲线分析来测量水加载试件上的泄漏表面声波(LSAW)的速度，对于材料的定量表征是非常有用和独特的。该系统已应用于LiTaO_3晶体科学和工业领域的材料问题，用于确定晶体生长条件和评价质子交换层、磁区反转层等光电子器件制造工艺。1.建立了可靠的LFB系统，具有较高的LSAW速度测量精度，绝对精度在(？)[)0.01%，相对准确度在(]sy.+-内。[0.001%.2.用不同成分的48，48.5，49Li_2O-mol%的原料生长了3英寸直径的LiTaO_3晶体，进行了速度测量。它已经被展示给…了此外，随着Li_2O浓度的增加，X、Y和Z三个基本晶面上的速度和所有传播方向上的速度单调增加，相应的密度单调减小。3.将测量的速度与居里温度、化学成分和密度进行了比较。结果表明，LFB系统测定化学成分的灵敏度和分辨率远高于其他常规方法，如差热分析(DTA)、X射线荧光分析(XRF)和电感耦合等离子体原子发射光谱(ICPAES)。4.用激光声表面波焊接速度分布评价了直径为4英寸的光学级同成分LiTaO_3单晶的声学均匀性。沿晶体长度60 mm，速度增加了0.45m/S，对应的化学成分变化为+0.015%Li_2O-m o l%。该系统已用于Z切LiTaO_3衬底上的质子交换和磁区反转薄膜的表征。结果表明，该系统具有分辨质子交换层扩散深度为1 nm的变化和磁区反转层厚度为1 nm的变化的能力。6.编制了上述层状结构LSAW传播特性的数值计算程序。较少

项目成果

J.Kushibiki and I.Takanaga: ""Elastic properties of single-and multi-domain crystals of LiTaO_3"" J.Appl.Phys. Vol.81 No.10. 6906-6910 (1997)

J.Kushibiki 和 I.Takanaga：“LiTaO_3 单域和多域晶体的弹性性能”J.Appl.Phys。

A.Tourlog, J.D.Achenbach, and J.Kushibiki: ""Line-focus acoustic microscopy measurements of acoustic properties of LiTaO_3 crystal plates with an inversion layr"" J.Appl.Phys.Vol.81 No.10. 6616-6621 (1997)

A.Tourlog、J.D.Achenbach 和 J.Kushibiki：“具有反演层的 LiTaO_3 晶体板的声学特性的线聚焦声学显微镜测量”J.Appl.Phys.Vol.81 No.10。

J.Kushibiki and I.Takanaga: "Elastic properties of single-and multi-domain crystals of LiTaO_3" J.Appl.Phys. 81・10. 6906-6910 (1997)

J.Kushibiki 和 I.Takanaga：“LiTaO_3 的单域和多域晶体的弹性” J.Appl.Phys 81・10（1997）。

J.Kushibiki and M.Miyashita: "A Method for Calibrating the Line-Focus-Beam Acoustic Microscopy System" IEEE Trans.Ultaron.,Ferroelect.,Freq.,Contr.,. 45・2. 421-430 (1998)

J.Kushibiki 和 M.Miyashita：“校准线聚焦束声学显微镜系统的方法”IEEE Trans.Ultaron.，Ferroelect.，Freq.，Contr.，421-430 (1998)。

A.Tourlog, J.D.Achenbach, and J.Kushibiki: "Line-focus acoustic microscopy measurements of acoustic properties of LiTaO_3 crystal plates with an inversion layer" J.Appl.Phys.81・10. 6616-6621 (1997)

A.Tourlog、J.D.Achenbach 和 J.Kushibiki：“具有反型层的 LiTaO_3 晶体板的声学特性的线聚焦声学显微镜测量”J.Appl.Phys.81・10 (1997)。