Ultrasonic Microspectroscopy of Wide Bandgap Semiconductor Materials
宽带隙半导体材料的超声显微光谱
基本信息
- 批准号:23246075
- 负责人:
- 金额:$ 30.53万
- 依托单位:
- 依托单位国家:日本
- 项目类别:Grant-in-Aid for Scientific Research (A)
- 财政年份:2011
- 资助国家:日本
- 起止时间:2011-04-01 至 2014-03-31
- 项目状态:已结题
- 来源:
- 关键词:
项目摘要
To realize highly efficient and long life devices using wide bandgap semiconductors, such as AlN, ZnO, SiC, and GaN, it is necessary to employ homogeneous bulk single crystal substrates as well as proper fabrication processes for making homogeneous and high-quality films. To do so, we developed a new method for evaluating semiconductor materials using ultrasonic micro-spectroscopy (UMS) technology as an accurate evaluation technology. Although characterization of epitaxial film is generally difficult because of their elastic anisotropy, we demonstrated usefulness of the evaluation method through measuring velocities of leaky surface acoustic waves by the UMS technology and measuring density based on the Archimedes' principle for Sc doped AlN film specimens.
为了使用宽带隙半导体(例如AlN、ZnO、SiC和GaN)实现高效和长寿命的器件,必须采用均匀的块状单晶衬底以及用于制造均匀和高质量膜的适当的制造工艺。 为此,我们开发了一种使用超声显微光谱(UMS)技术作为准确评估技术来评估半导体材料的新方法。虽然外延膜的表征通常是困难的,因为它们的弹性各向异性,我们证明了有用的评估方法,通过测量速度的泄漏表面声波的UMS技术和测量密度的基础上的阿基米德原理的Sc掺杂AlN薄膜试样。
项目成果
期刊论文数量(13)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
Surface Acoustic Wave Properties of Amorphous Ta_2O_5 and Nb_2O_5 Thin Films Prepared by Radio Frequency Sputtering
射频溅射制备非晶Ta_2O_5和Nb_2O_5薄膜的表面声波性能
- DOI:10.1143/jjap.51.07ga01
- 发表时间:2012
- 期刊:
- 影响因子:0
- 作者:S.Kakio;K.Hosaka;M.Arakawa;Y.Ohashi;and J.Kushibiki
- 通讯作者:and J.Kushibiki
Determination Method of Acoustical Physical Constants and Their Temperature Coefficients of La_3Ta_<0.5>Ga_<5.3>Al_<0.2>O_<14> Single Crystal
La_3Ta_<0.5>Ga_<5.3>Al_<0.2>O_<14>单晶声学物理常数及其温度系数的测定方法
- DOI:10.1109/ultsym.2012.0686
- 发表时间:2012
- 期刊:
- 影响因子:0
- 作者:Y.Ohashi;T.Karaki;T.Lv;H.Yoshida;M.Arakawa;M.Adachi and J.Kushibiki
- 通讯作者:M.Adachi and J.Kushibiki
Analyzing Crystals by Ultrasonic Microspectroscopy
通过超声波显微光谱分析晶体
- DOI:
- 发表时间:2013
- 期刊:
- 影响因子:0
- 作者:Yuji Ohashi;Mototaka Arakawa;and Jun-ichi Kushibiki
- 通讯作者:and Jun-ichi Kushibiki
Evaluation of Acoustical Properties for GaN Single Crystal by the Ultrasonic Microspectroscopy Technology
超声显微光谱技术评价GaN单晶的声学特性
- DOI:
- 发表时间:2012
- 期刊:
- 影响因子:0
- 作者:Shintaro Hisatake;and Tadao Nagatsuma;Jae-Young Kim and Katsuhiro Ajito;Yuji Ohashi and Jun-ichi Kushibiki
- 通讯作者:Yuji Ohashi and Jun-ichi Kushibiki
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KUSHIBIKI Jun-ichi其他文献
KUSHIBIKI Jun-ichi的其他文献
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{{ truncateString('KUSHIBIKI Jun-ichi', 18)}}的其他基金
Development of an optical cavity with residual strain free for optical frequency standards
开发符合光频率标准的无残余应变光学腔
- 批准号:
25630167 - 财政年份:2013
- 资助金额:
$ 30.53万 - 项目类别:
Grant-in-Aid for Challenging Exploratory Research
Evaluation of glass thin films by the ultrasonic microspectroscopy technology
超声显微光谱技术评价玻璃薄膜
- 批准号:
23656260 - 财政年份:2011
- 资助金额:
$ 30.53万 - 项目类别:
Grant-in-Aid for Challenging Exploratory Research
Ultrasonic Microspectroscopy of Ultra-High-Quality Synthetic a-Quartz
超高品质合成 a-石英的超声波显微光谱
- 批准号:
13555085 - 财政年份:2001
- 资助金额:
$ 30.53万 - 项目类别:
Grant-in-Aid for Scientific Research (B)
Development of a Method to Evaluate the Surface of Single Crystal Substrates for Super-High-Frequency SAW Devices by UMS Technology
利用 UMS 技术开发评估超高频 SAW 器件单晶衬底表面的方法
- 批准号:
12450119 - 财政年份:2000
- 资助金额:
$ 30.53万 - 项目类别:
Grant-in-Aid for Scientific Research (B)
Development of Ultrasonic Microspectroscopy for Characterization of Layered and Damaged Surfaces on Single Crystal Substrates
用于表征单晶基底上的层状和损伤表面的超声波显微光谱学的发展
- 批准号:
10555099 - 财政年份:1998
- 资助金额:
$ 30.53万 - 项目类别:
Grant-in-Aid for Scientific Research (B)
Ultrasonic Microspectroscopy for High-Precision Surface Characterization of Substrates for Electronics Devices
用于电子设备基材高精度表面表征的超声波显微光谱
- 批准号:
09450120 - 财政年份:1997
- 资助金额:
$ 30.53万 - 项目类别:
Grant-in-Aid for Scientific Research (B)
Precise Determination of Acoustical Physical Constants of LiNbO_3 and LiTaO_3 Single Crystals
LiNbO_3和LiTaO_3单晶声学物理常数的精确测定
- 批准号:
07455127 - 财政年份:1995
- 资助金额:
$ 30.53万 - 项目类别:
Grant-in-Aid for Scientific Research (B)
Ultrasonic Microspectroscopy of LiTaO_3 Single Crystals for Optoelectronic Devices
光电器件用LiTaO_3单晶的超声显微光谱
- 批准号:
07555408 - 财政年份:1995
- 资助金额:
$ 30.53万 - 项目类别:
Grant-in-Aid for Scientific Research (A)
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