Study on Ultraminiature Thermal Analysis Device and its Thermal Analysis Method

超微型热分析装置及其热分析方法的研究

基本信息

  • 批准号:
    10650340
  • 负责人:
  • 金额:
    $ 0.58万
  • 依托单位:
  • 依托单位国家:
    日本
  • 项目类别:
    Grant-in-Aid for Scientific Research (C)
  • 财政年份:
    1998
  • 资助国家:
    日本
  • 起止时间:
    1998 至 1999
  • 项目状态:
    已结题

项目摘要

The purpose of this study is to fabricate a micro-air-bridge heater, a sample holder and a temperature sensor monolithically, to investigate original heating method and its control system, to investigate the deduction method of physical quantities obtained from comparison between theoretical thermal equations and experimental data, to investigate calorimetric evaluations, to develop the thermal analysis device measurable from low to high temperature, to investigate actual thermal analytical evaluations of organic and inorganic materials, to investigate the magnetic materials thermal analytically, to identify the initial mass and time dependent change of the mass of various samples from initial and time dependent thermal variations, to investigate these phenomena theoretically, to fabricate a handy ultraminiature thermal analysis device and to construct the basis of the original thermal analysis system, and to establish the variable B-constant circuits for transistor-thermistor as a tem … More perature sensor. Results of this study are as follows:1) Suitable size and shape for microheater and sample holder, materials of thermocouple and etching process are investigated and evaluated, and it is found that combination of Au and Ni film as a thermocouple are the best for this purpose from the point of view of reproduction. 2) Control system for temperature scanning suitable to the sensing portion is made and is demonstrated by personal computer drive adopting the constant-power-rate scanning. 3) A new method to get a heating-rate curve without the reference-sample is established in order to confirm and to evaluate the differentiation method with respect to time. 4) Evaluation method of initial mass of a sample such as water is established, and the enthalpy of the water sample is obtained. 5) Transistor-thermistors of both bipolar type and MOSFET type are proposed to measure the absolute temperature of the substrate, and are considered theoretically, and are demonstrated to be able to be monolithically integrated with a miniaturized thermal analysis sensor. 6) Partial cooling system to control the temperature of the sample-holder from low to high temperature is performed using the temperature control system combined with a Peltier device. 7) It is demonstrated that thermal analysis for some samples including water from ice to vapor is carried out within 30 seconds. As mentioned above, we have clarify a guide-line to achieve the thermal analysis system with high speed, lower power consumption, very high sensitivity for very small quantity of sample. The purpose of this basic study is successfully achieved, except evaluation of the magnetic materials. Less
本研究的目的是将微气桥加热器、样品保持器和温度传感器制成一体,研究原始的加热方法及其控制系统,研究由理论热方程和实验数据比较得到的物理量的推导方法,研究量热评价,开发从低温到高温可测量的热分析装置,研究有机和无机材料的实际热分析评估,研究磁性材料的热分析,从初始和时间相关的热变化中识别各种样品的初始质量和质量的时间相关变化,从理论上研究这些现象,研制了一种轻便的超小型热分析装置,构成了原有热分析系统的基础,并建立了晶体管-热敏电阻器的变B常数电路, ...更多信息 温度传感器1)对微加热器和样品保持器的尺寸和形状、热电偶材料和腐蚀工艺进行了研究和评价,从再现性的角度考虑,发现Au和Ni膜组合作为热电偶是最佳的。2)制作了适合于传感部分的温度扫描控制系统,并采用恒功率扫描方式,通过微机驱动进行了演示。3)为了验证和评价时间微分法,提出了一种无参考样品的升温速率曲线求取方法。4)以水为例,建立了初始质量的估算方法,得到了水的焓值。5)提出了双极型和MOSFET型晶体管热敏电阻测量衬底的绝对温度,并从理论上考虑,并证明能够单片集成与小型化的热分析传感器。6)使用与Peltier装置结合的温度控制系统执行部分冷却系统以控制样品保持器的温度从低温到高温。7)它表明,热分析的一些样品,包括水从冰到蒸汽是在30秒内进行。如上所述,我们已经明确了一个指导方针,以实现快速,低功耗,非常高的灵敏度,非常少量的样品热分析系统。除了磁性材料的评价外,本基础研究的目的已经成功实现。少

项目成果

期刊论文数量(39)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
木村光照: "熱型マイクロセンサ"電子情報通信学会 信学技報. ED98-264. 1-8 (1998)
Mitsuteru Kimura:“热微传感器”IEICE 技术报告 ED98-264 (1998)。
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    0
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早坂淳一 他: "マイクロエアブリッジヒータを用いた超小型熱分析デバイスとその新しい加熱速度曲線の導出法"電気学会論文誌E. 119巻 3号. 119-124 (1999)
Junichi Hayasaka 等:“使用微型空气桥加热器的超小型热分析装置及其推导其加热速率曲线的新方法”日本电气工程师学会汇刊 E.第 119 卷第 3.119- 124 (1999)
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    0
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Jun-ichi Hayasaka, Chikako Sawai, Mitsuteru Kimura: "Investigation on Ultraminiature Thermal Analysis System"IEE of Japan, Proc. Comprehensive Meeting of Division E. PS-98-2. 7-l2 (1998)
Jun-ichi Hayasaka、Chikako Sawai、Mitsuteru Kimura:“超小型热分析系统的研究”日本 IEE,Proc.
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    0
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Mitsuteru Kimura: "Physical Sensors (Thermal Micro-Sensors) , Development from Fundamental to Up-Date Technology"Next Generation Association. J-TS-116. 11-19 (1999)
Mitsuteru Kimura:“物理传感器(热微传感器),从基础技术到最新技术的发展”下一代协会。
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    0
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後藤靖 他: "トランジスタサーミスタの検討"電気学会研究会資料. PS-99-3. 5-10 (1999)
Yasushi Goto 等人:“晶体管热敏电阻的研究”IEEJ 研究组材料。PS-99-3 (1999)。
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KIMURA Mitsuteru其他文献

KIMURA Mitsuteru的其他文献

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{{ truncateString('KIMURA Mitsuteru', 18)}}的其他基金

Study on a microheater combined with pn junction temperature sensors having fast response and high sensitivity and its applications
快速响应高灵敏度pn结温度传感器微加热器的研究及其应用
  • 批准号:
    14550328
  • 财政年份:
    2002
  • 资助金额:
    $ 0.58万
  • 项目类别:
    Grant-in-Aid for Scientific Research (C)
STUDY ON SCHOTTKY TUNNEL TRANSISTOR
肖特基隧道晶体管的研究
  • 批准号:
    08650410
  • 财政年份:
    1996
  • 资助金额:
    $ 0.58万
  • 项目类别:
    Grant-in-Aid for Scientific Research (C)
Study on the miniature Opto-Electric Thin Film Transformer
微型光电薄膜变压器的研究
  • 批准号:
    04650347
  • 财政年份:
    1992
  • 资助金额:
    $ 0.58万
  • 项目类别:
    Grant-in-Aid for General Scientific Research (C)
Study on Integratable Si Magnetic Sensor with Three Terminals.
可集成三端子硅磁传感器的研究。
  • 批准号:
    60550281
  • 财政年份:
    1985
  • 资助金额:
    $ 0.58万
  • 项目类别:
    Grant-in-Aid for General Scientific Research (C)

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采用微机械技术的非接触驱动体内嵌入装置的骨膜扩张成骨方法
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无损操控细胞聚集体微机械的研究
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Heart-Lung Micromachine for Safety and Efficacy Testing
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Research on micromachine technology for transplantation surgery based on tissue engineering
基于组织工程的移植手术微机械技术研究
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