Study on Ultraminiature Thermal Analysis Device and its Thermal Analysis Method

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The purpose of this study is to fabricate a micro-air-bridge heater, a sample holder and a temperature sensor monolithically, to investigate original heating method and its control system, to investigate the deduction method of physical quantities obtained from comparison between theoretical thermal equations and experimental data, to investigate calorimetric evaluations, to develop the thermal analysis device measurable from low to high temperature, to investigate actual thermal analytical evaluations of organic and inorganic materials, to investigate the magnetic materials thermal analytically, to identify the initial mass and time dependent change of the mass of various samples from initial and time dependent thermal variations, to investigate these phenomena theoretically, to fabricate a handy ultraminiature thermal analysis device and to construct the basis of the original thermal analysis system, and to establish the variable B-constant circuits for transistor-thermistor as a tem … More perature sensor. Results of this study are as follows:1) Suitable size and shape for microheater and sample holder, materials of thermocouple and etching process are investigated and evaluated, and it is found that combination of Au and Ni film as a thermocouple are the best for this purpose from the point of view of reproduction. 2) Control system for temperature scanning suitable to the sensing portion is made and is demonstrated by personal computer drive adopting the constant-power-rate scanning. 3) A new method to get a heating-rate curve without the reference-sample is established in order to confirm and to evaluate the differentiation method with respect to time. 4) Evaluation method of initial mass of a sample such as water is established, and the enthalpy of the water sample is obtained. 5) Transistor-thermistors of both bipolar type and MOSFET type are proposed to measure the absolute temperature of the substrate, and are considered theoretically, and are demonstrated to be able to be monolithically integrated with a miniaturized thermal analysis sensor. 6) Partial cooling system to control the temperature of the sample-holder from low to high temperature is performed using the temperature control system combined with a Peltier device. 7) It is demonstrated that thermal analysis for some samples including water from ice to vapor is carried out within 30 seconds. As mentioned above, we have clarify a guide-line to achieve the thermal analysis system with high speed, lower power consumption, very high sensitivity for very small quantity of sample. The purpose of this basic study is successfully achieved, except evaluation of the magnetic materials. Less