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Study on the miniature Opto-Electric Thin Film Transformer

微型光电薄膜变压器的研究

基本信息

批准号：
04650347
负责人：
KIMURA Mitsuteru
金额：
$ 1.34万
依托单位：
Tohoku-gakuin University
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (C)
财政年份：
1992
资助国家：
日本
起止时间：
1992 至 1993
项目状态：
已结题

项目摘要

This research aims for the optical power supply to the Micro-Electro-Mechanical Systems. In order to overcome the unavoidable uneven problems arisen at the formation of the multilayr spiral coil, we have newly developed the fabrication method of the essentially flat spiral coil by means of the partial anodic oxidation of the evaporated AI thin film. We have found the problem how to check the end point of the anodic oxidation, but we have overcome this problem by means of simultaneous formation of the monitor coil adjacent to the real one and check the leakage current through this monitor coil. We have also developed the methods how to fabricate the double layr thin film coil and the transformer by the combination of these coils. We have given up further investigation to achieve the first aim of 5 V output transformer, because we have noticed the yield will be getting worse as pilling up the layrs, and have proposed a new method to make the multilayr coil and multilayr transformer. As to the second aim for high efficiency photo-cell, we have proposed a new method to couple the light of the LD through the optical fiber efficiently to the photo-cell, and have demonstrated although further investigation is still needed. This idea is that the p-n junction plane of the photo-cell is formed parallel to the incident light of 830mm which is absorbed traveling along this junction plane, because the 830mm light has relatively long absorption length of about 15mum in Si. I have made an application of Grant-in-Aid for Scientiffic Research in 1994 for establishment of this research. As to the third aim for optimum operation conditions and operating simulations, we have analyzed by using the PSPICE simulator. As to the fourth aim for the development of the high speed and low on-state resistance transistor for switching the DC current arisen by the DC light, we have proposed a new Schottky tunnel transistor and its fundamental characteristics are demonstrated. The structure of thi

本课题的研究目标是为微电子机械系统提供光电源。为了克服多层螺旋线圈形成过程中不可避免的不均匀问题，我们通过蒸发Al薄膜的部分阳极氧化，新发展了基本平坦的螺旋线圈的制备方法。我们发现了如何检查阳极氧化终点的问题，但我们通过同时形成与实际线圈相邻的监控线圈并检查通过该监控线圈的泄漏电流来克服这一问题。我们还研究了如何将这些线圈组合起来制作双层薄膜线圈和变压器的方法。为了实现5V输出变压器的第一个目标，我们放弃了进一步的研究，因为我们注意到随着起球层的增加，成品率会变差，并提出了一种制作多层线圈和多层变压器的新方法。对于高效率光电池的第二个目标，我们提出了一种将半导体激光器的光通过光纤高效耦合到光电池的新方法，并进行了演示，但仍有待进一步研究。这种想法是，光电池的p-n结面平行于沿该结面被吸收的830 mm入射光形成，因为830 mm光在Si中具有相对较长的吸收长度，约为15微米。我在1994年申请了科学研究助学金，以建立这项研究。对于第三个优化操作条件和操作模拟的目标，我们利用PSPICE仿真器进行了分析。针对高速低导通电阻晶体管研制的第四个目标，我们提出了一种新的肖特基隧道晶体管，并对其基本特性进行了分析。这份报告的结构