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Study on a microheater combined with pn junction temperature sensors having fast response and high sensitivity and its applications

快速响应高灵敏度pn结温度传感器微加热器的研究及其应用

基本信息

批准号：
14550328
负责人：
KIMURA Mitsuteru
金额：
$ 2.3万
依托单位：
Tohoku-Gakuin University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2002
资助国家：
日本
起止时间：
2002 至 2004
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-14550328/
关键词：
Temperature sensor Silicon Pn junction diode Thermal sensor Microheater Flow sensor Vacuum sensor Humidity sensor

项目摘要

Themal devices combined with a planar heater formed on a micro-air-bridge consisting of a 501 layer of the SOT substrate and pn junction temperature sensors, especially the gas sensing device which is invented during this research tenn, are mainly investigated. Following experimental results are obtained.1.Absolute temperature sensor consisting of only single pn junction diode with very high sensitivity which can be adjusted to be the thermistor like sensitivity by applied bias voltage, is demonstrated to be able to measure the temperature range of -200 to 500 C.2.Absolute humidity sensors are fabricated as a trial experiment and its operations are confirmed. Absolute humidity sensing independent on the ambient temperature below 150 C is demonstrated.3.Vacuum sensor with a sensitivity of two order larger or more than that of traditional Pirani gauge is achieved by use of the micro-air-bridge (MAB) structure with a single microheater and two diode-bermistors. It is demonstrated that we … More can measure the pressure range between an atmospheric pressure and 1x10^3 Pa. (collaboration with MEMS Core Co. Ltd.).4.Electrode materials and wiring structure patient up to 450 C for absolute humidity sensor are investigated and demonstrated. (collaboration with Yamagata Chino Co. Ltd.).5.Liquid micro flow sensor is formed and demonstrated. (collaboration with Daiken Iki Co. Ltd.)..6.Thermal bio-sensor using the enzyme reaction is proposed4 and it is found that we can surely measure the value of the blood sugar by use of diode thermistor as a temperature sensor and glucose oxidase due to the primitive experiments and simulation.7.Current detection type thermocouple as a temperature sensor measuring only the temperature difference is invented, and that is formed as the cantilever or MAB structure and is investigated.8.Heating diode temperature sensor of the diode thermistor, which is used by heating, is invented, and high S/N is confirmed from its experiments.Some of these accomplishments are applied as patents, and most results are presented in the society meeting. As to the vacuum sensor it is presented and demonstrated at the exhibition Less

本文主要研究了在SOT衬底501层构成的微空气桥上形成的平面加热器与pn结温度传感器相结合的器件，特别是本课题组研制的气敏器件。实验结果表明：1.由单个pn结二极管构成的绝对温度传感器具有很高的灵敏度，通过外加偏置电压可以调节到热敏电阻的灵敏度，能够测量-200 ~500 ℃的温度范围。2.制作了绝对湿度传感器，并进行了实验验证。3.采用微加热器和双二极管的微空气桥（MAB）结构，实现了灵敏度比传统皮拉尼真空计高两个数量级以上的真空传感器。这表明，我们 ...更多信息可以测量大气压和1x10^3 Pa之间的压力范围。（与MEMS Core Co. Ltd.合作）。4.本文研究和论证了温度高达450 ℃的绝对湿度传感器的电极材料和布线结构。（与山形奇诺株式会社合作）5.研制了液体微流量传感器。（与大研伊基株式会社合作）6.提出了利用酶反应的热生物传感器4，通过初步实验和模拟，发现利用二极管热敏电阻作为温度传感器和葡萄糖氧化酶确实可以测量血糖值。7.发明了电流检测型热电偶作为仅测量温差的温度传感器，8.发明了一种加热用二极管热敏电阻的加热二极管温度传感器，并通过实验验证了其高信噪比，其中部分成果已申请专利，大多数结果在学会会议上公布。至于真空传感器，它在展览会上展示和演示收起