Study on a microheater combined with pn junction temperature sensors having fast response and high sensitivity and its applications

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Themal devices combined with a planar heater formed on a micro-air-bridge consisting of a 501 layer of the SOT substrate and pn junction temperature sensors, especially the gas sensing device which is invented during this research tenn, are mainly investigated. Following experimental results are obtained.1.Absolute temperature sensor consisting of only single pn junction diode with very high sensitivity which can be adjusted to be the thermistor like sensitivity by applied bias voltage, is demonstrated to be able to measure the temperature range of -200 to 500 C.2.Absolute humidity sensors are fabricated as a trial experiment and its operations are confirmed. Absolute humidity sensing independent on the ambient temperature below 150 C is demonstrated.3.Vacuum sensor with a sensitivity of two order larger or more than that of traditional Pirani gauge is achieved by use of the micro-air-bridge (MAB) structure with a single microheater and two diode-bermistors. It is demonstrated that we … More can measure the pressure range between an atmospheric pressure and 1x10^3 Pa. (collaboration with MEMS Core Co. Ltd.).4.Electrode materials and wiring structure patient up to 450 C for absolute humidity sensor are investigated and demonstrated. (collaboration with Yamagata Chino Co. Ltd.).5.Liquid micro flow sensor is formed and demonstrated. (collaboration with Daiken Iki Co. Ltd.)..6.Thermal bio-sensor using the enzyme reaction is proposed4 and it is found that we can surely measure the value of the blood sugar by use of diode thermistor as a temperature sensor and glucose oxidase due to the primitive experiments and simulation.7.Current detection type thermocouple as a temperature sensor measuring only the temperature difference is invented, and that is formed as the cantilever or MAB structure and is investigated.8.Heating diode temperature sensor of the diode thermistor, which is used by heating, is invented, and high S/N is confirmed from its experiments.Some of these accomplishments are applied as patents, and most results are presented in the society meeting. As to the vacuum sensor it is presented and demonstrated at the exhibition Less