Development of a sensor for environmental monitoring using a semiconductor thin-film

使用半导体薄膜开发环境监测传感器

• 批准号: 10650415
• 负责人: HARA Kazuhiro
• 金额: $ 1.28万
• 依托单位: Tokyo Denki University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1998
• 资助国家: 日本
• 起止时间: 1998 至 2000
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10650415/
• 关键词: Sensor for environmental monitoring; Integrated sensor; Thin-film gas sensor; Ferric oxide; Stannic oxide; 酸化タングステン; 花粉センサ

A sensor for environmental monitoring has been developed. A sensing film is deposited on a tri-layered SiO_2/Al_2O_3/SiO_2 diaphragm by rf sputtering ; the diaphragm is formed on an Si wafer with micro-machining technology. The sensing film is composed of double-layered Fe_2O_3-based film and SnO_2-based one. The patterning of the sensing film is carried out with photolithography technique. A micro-heater is formed on another diaphragm in a similar way. It is used to heat the sensing film up to about 300℃.The electrical conductance of the fabricated sensor changes when a pollutant gas such as CO and NO_x is introduced. It also changes when cigarette smoke or exhausted gas is introduced. It steeply increases and then slowly decreases when a piece of pollen is adsorbed on the surface of the sensing film. It is also sensitive to volatile organic compounds (VOCs) such as formaldehyde, toluene and xylene.Thus the sensor is found to be promising as a small, low-powered, inexpensive sensor for environmental monitoring.The selectivity to the kind of environmental pollution should be improved in a future study.

研制了一种用于环境监测的传感器。采用射频溅射法在SiO_2/Al_2O_3/SiO_2三层结构的膜片上沉积敏感膜，并利用微机械加工技术在硅片上形成膜片。敏感膜由Fe_2O_3基和SnO_2基双层膜组成。感测膜的图案化利用光刻技术进行。微加热器以类似的方式形成在另一隔膜上。当引入CO和NOx等污染气体时，所制备的传感器的电导发生变化。当引入香烟烟雾或废气时，它也会发生变化。当一片花粉吸附在敏感膜表面上时，它先急剧增加，然后缓慢下降。该传感器对甲醛、甲苯和二甲苯等挥发性有机物（VOCs）也很敏感，有望成为一种体积小、功耗低、价格低廉的环境监测传感器，对环境污染物的选择性有待进一步提高。

项目成果

中島勲: "サファイア基板上に製作された湿度センサ"電気学会 化学センサシステム研究会資料. CS-98. 19-24 (1998)

Isao Nakajima：“在蓝宝石衬底上制造的湿度传感器”IEEJ 化学传感器系统研究组材料 CS-98 (1998)。

垣沼克好: "環境計測用マイクロセンサの研究"電子情報通信学会 技術研究報告. CPM98. 53-58 (1998)

Katsuyoshi Kakinuma：“环境测量微传感器的研究”IEICE 技术研究报告，CPM98（1998）。

原和裕: "集積化半導体薄膜ガス・湿度センサの開発"東京電機大学総合研究所年報. 17. 21-26 (1998)

原和弘：“集成半导体薄膜气体/湿​​度传感器的开发”东京电机大学研究所年报17. 21-26 (1998)。

Supratic Chakraborty.: "New microhumidity field-effect transistor sensor in ppm level"Review of Scientific Instruments. 70. 1565-1567 (1999)

Supratic Chakraborty.：“ppm 级的新型微湿度场效应晶体管传感器”科学仪器评论。

村山英久: "シリコン基板上に製作された集積化ガスセンサ"電気学会論文誌E. 118-E. 602-607 (1998)

Hidehisa Murayama：“在硅基板上制造的集成气体传感器”日本电气工程师学会汇刊 E. 118-E. 602-607 (1998)