Development of fast high-sensitivity scanning charge microscope

快速高灵敏度扫描电荷显微镜的研制

• 批准号: 12355002
• 负责人: SHIMADA Hiroshi
• 金额: $ 13.6万
• 依托单位: The University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 2000
• 资助国家: 日本
• 起止时间: 2000 至 2002
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-12355002/
• 关键词: single-electron transistor; scanning probe microscope; charge microscope; fast measurement; optical fiber; 単一トランジスタ

The goal of this project is to develop a versatile fast scanning charge microscope which utilizes the single-electron transistor as its charge sensor and works at 2K. We have introduced a low-temperature scanning shear-force microscope as the basic servo scanning system for the charge microscope. The shear force microscope uses as its force sensor a sharpened optical fiber that is fixed on a quartz oscillator on the sensor head. We have developed a fabrication process of a single-electron transistor on the tip of the sharpened optical fiber. The process comprises a sharpening process of an optical fiber by using a selective etching technique of a dispersion- compensation fiber, and a formation of double small tunnel junctions on the tip of the sharpened fiber mostly by means of a vacuum-evaporation deposition.We have also developed versatile fast-measuring circuits of the single-electron transistor. The main part of the circuits is a current amplifier that is composed of an operational amplifier (opamp) and it measures a conductance of a measured device. Generally a conductance measurement with a voltage biasing is less influenced by the stray capacitance of the signal cable than the resistance measurement with a current biasing. We have further reduced the influence of the stray capacitance of the signal cable by using a C-MOS based opamp (TLC4501) and putting the amplifier near the sensor device in liquid He and making the signal cable short, or by using a tri-axial signal cable and driving its middle conductor with a voltage follower at the voltage of the signal line and reducing the stray capacitance effectively.Unfortunately we have spent a lot of effort and time on the development of the fabrication process of the charge sensor, and we have not succeeded in integrating all the elements described above and constructing the charge microscope itself during the period of the project.

该项目的目的是开发一种多功能的快速扫描电荷显微镜，该扫描电荷显微镜利用单电子晶体管作为电荷传感器，并以2k的速度工作。我们已经引入了低温扫描剪切力显微镜，作为电荷显微镜的基本伺服扫描系统。剪切力显微镜用作其力传感器，是固定在传感器头上石英振荡器上的锐化光纤。我们已经在锐化的光纤尖端上开发了单电子晶体管的制造过程。该过程包括通过使用色散的选择性蚀刻技术的光纤锐化过程，以及在锐化纤维尖端上形成双小隧道连接纤维的形成，主要是通过真空蒸发沉积来进行的。电路的主要部分是由操作放大器（OPAMP）组成的电流放大器，并测量了测量设备的电导。通常，与信号电缆的散落电容相比，与电流偏置相比，信号电缆的散落电容的影响较小。 We have further reduced the influence of the stray capacitance of the signal cable by using a C-MOS based opamp (TLC4501) and putting the amplifier near the sensor device in liquid He and making the signal cable short, or by using a tri-axial signal cable and driving its middle conductor with a voltage follower at the voltage of the signal line and reducing the stray capacitance effectively.Unfortunately we have spent a lot of effort and time关于电荷传感器制造过程的开发，我们还没有成功整合上述所有元素并在项目期间构建了电荷显微镜本身。

项目成果

H.Shimada, K.Ono, Y.Ootuka: "Driving the single-electron device with a magnetic field"Journal of Applied Physics.. 93巻・10号. (2003)

H.Shimada、K.Ono、Y.Ootuka：“用磁场驱动单电子装置”应用物理杂志。第 93 卷，第 10 期。（2003 年）

Driving the single-electron device with a magnetic field

用磁场驱动单电子器件

• 发表时间: 2003
• 期刊: Journal of Applied Physics 93巻・10号
• 作者: H.Shimada;K.Ono;Y.Ootuka
• 通讯作者: Y.Ootuka