Development of optical MEMS estimating system

光学MEMS估算系统的开发

• 批准号: 14550248
• 负责人: ARAI Yasuhiko
• 金额: $ 1.98万
• 依托单位: Kansai University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2002
• 资助国家: 日本
• 起止时间: 2002 至 2004
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-14550248/
• 关键词: Interferometrv; MEMS; Spatial fringe analysis method; Moire Topography; SEM; マイクロカンチレバー; Speckle Interferometry; 縞解析法; 空間的縞解析法; 電子スペックル干渉法; 応力解析; 伝熱解析

A shape measurement method for MEMS is proposed by using optical three dimensional shape measurement based on micro-Feazo interferometry. This technique has achieved static and dynamic deformation of MEMS by using an image intensifier. The deformation measurement is realized by analyzing the interferogram which is taken by micro-Feazo interferometry. Generally, it is thought that the optical measurement is non-contact measurement method, however, when a micro structure is measured by optical measurement method, the laser beam influenced the micro-structure by heat for measurement. When this phenomenon is used, it has been proposed that it is also possible that a micro-structure can be driven by a heat though this phenomenon is a problem for the measurement. In order to improve the spatial fringe analysis method for fringe scanning, the speckle interferometry as a new analyzing method is introduced in this study. The new measurement method, which can analyze precisely a deformation of the structure by using only 2 sheets of speckle patterns, is proposed. The new measurement method, which can analyze precisely a deformation of the structure by using only 2 sheets of speckle patterns, is proposed. Furthermore, the technology which can give the possibility of the three dimensional measurement with some ten nm is proposed by introducing moir6 topography to scanning electron microscope.

提出了一种基于微 Feazo 干涉技术的光学三维形状测量的 MEMS 形状测量方法。该技术通过使用图像增强器实现了MEMS的静态和动态变形。通过分析微Feazo干涉仪拍摄的干涉图实现变形测量。通常，光学测量被认为是非接触式测量方法，然而，当通过光学测量方法测量微结构时，激光束通过测量时的热量影响微结构。当利用这种现象时，已经提出微结构也可以由热驱动，尽管这种现象对于测量来说是一个问题。为了改进条纹扫描的空间条纹分析方法，本文引入散斑干涉测量作为一种新的分析方法。提出了一种新的测量方法，只需使用两片散斑图案即可精确分析结构的变形。提出了一种新的测量方法，只需使用两片散斑图案即可精确分析结构的变形。此外，还提出了通过将莫尔6形貌引入扫描电子显微镜，使十纳米左右的三维测量成为可能。

项目成果

モアレトポグラフィを用いた応用解析の可能性

使用莫尔形貌进行应用分析的可能性

• 发表时间: 2003
• 期刊: 実験力学 Vol.3 No.1
• 作者: 新井泰彦;藤田武良;横関俊介
• 通讯作者: 横関俊介

Possibility of application of moire topography

应用莫尔形貌的可能性

• 发表时间: 2003
• 期刊: Experimental Mechanics Vol.3 No.1
• 作者: Yasuhiko Arai;Shunsuke Yokozeki;Takeyoshi Fujita
• 通讯作者: Takeyoshi Fujita

Heat deformation in optical measurement of MEMS

MEMS光学测量中的热变形

• 发表时间: 2002
• 期刊: Proceedings of IMECE'02 2002 ASME international mechanical engineering congress & exprosition IMECE 2002-33399
• 作者: Yasuhiko Arai;Tatsuya Nakagami;Seiji Aoyagi;Atsunobu Mori
• 通讯作者: Atsunobu Mori

Y.Arai, S.Yokozeki: "Investigation using communication theory in spatial fringe analysis method"Proceedings of Optomechatronic System III 12-14 November 2002 Stuttgart, Germany. Vol.4902. 1-8 (2002)

Y.Arai、S.Yokozeki：“在空间条纹分析方法中使用通信理论进行的调查”Optomechatronic System III 论文集，2002 年 11 月 12-14 日，德国斯图加特。

Development of metrokgy of micro-structure using SEM based on Moire topography

基于莫尔形貌的SEM微结构测量技术的发展

• 发表时间: 2005
• 期刊: Kougaku Vol.34,No.4(in press)
• 作者: Y.Aral;S.Yokozeki
• 通讯作者: S.Yokozeki