Development of optical MEMS estimating system

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A shape measurement method for MEMS is proposed by using optical three dimensional shape measurement based on micro-Feazo interferometry. This technique has achieved static and dynamic deformation of MEMS by using an image intensifier. The deformation measurement is realized by analyzing the interferogram which is taken by micro-Feazo interferometry. Generally, it is thought that the optical measurement is non-contact measurement method, however, when a micro structure is measured by optical measurement method, the laser beam influenced the micro-structure by heat for measurement. When this phenomenon is used, it has been proposed that it is also possible that a micro-structure can be driven by a heat though this phenomenon is a problem for the measurement. In order to improve the spatial fringe analysis method for fringe scanning, the speckle interferometry as a new analyzing method is introduced in this study. The new measurement method, which can analyze precisely a deformation of the structure by using only 2 sheets of speckle patterns, is proposed. The new measurement method, which can analyze precisely a deformation of the structure by using only 2 sheets of speckle patterns, is proposed. Furthermore, the technology which can give the possibility of the three dimensional measurement with some ten nm is proposed by introducing moir6 topography to scanning electron microscope.