Gas Phase Synthesis of Non-Agglomerated Nanoparticles Using Coulombic Repulsive Force

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Ionization CVD method has been developed to form fast nanparticle films which non-agglomerated particles are deposited widely and uniformly on a substrate with a high number density. SiO_2 and Co nanoparticles have been synthesized from tetraethylorthosilicate (TEOS) and cobalt tricarbonyl nitrosyl (CoTN), respectively, by the developed synthesis apparatus. Following results have been obtained.(1) SiO_2 nanoparticles(1) Non-agglomerated and negatively charged SiO2 particles with 10 nm diameter are deposited uniformly with particle number density of 10^<10> cm^<-2> on Si substrate of 14x14 mm^2 area in the deposition time of 40 s.(2) Non-agglomerated SiO_2 particles with 20 nm diameter are deposited selectively on positively charged lines drew by the contact charging method. The length, wide, and number density of the nanoparticle lines are 10 mm, 500 nm and 4x10^<10> cm^<-2>.(2)Co nanoparticles(1) Non-agglomerated Co particles with 14 nm diameter are deposited uniformly with particle number density of 10^<11> cm^<-2> on Si substrate of 20x20 mm^2 area(2) Co nanoparticles synthesized are ferromagnetic.(3) Co nanoparticle films formed on a Si substrate coated with a thermal oxide film show a magnetic resistance.