Sub-10nm hard X-ray focusing and application to nanoscopy/spectroscopy

为了进一步提高x射线显微成像的空间分辨率，研制了一种亚10nm硬x射线聚焦系统。根据波光学理论，完成了硬x射线原位波前误差测量和误差补偿方法。在SPring-8上实现了世界上第一个亚10nm光束。然后，将聚焦系统升级为x射线纳米/光谱学。成功地观察到纳米厚度的Pt薄膜，其空间分辨率优于10nm。

In order to further improve the spatial resolution in X-ray microscopy, a sub-10nm hard X-ray focusing system was developed. In situ hard X-ray wavefront error measurement and error compensation methods were completed, following wave-optical theory. The world-first sub-10nm beam was realized at SPring-8. Then, the focusing system was upgraded to X-ray nanoscopy/spectroscopy. A nanometer-thickness films made of Pt was successfully observed with better than 10nm spatial resolution.