Evaluation of mechanical & electrical properties of Nanowires Used for Nano Mechanical Sensors Using Functional MEMS Device

本研究开发了原位扫描电子显微镜（SEM）纳米材料测试系统，以揭示碳纳米管（CNTs）的力学和电学性能，开发新型纳米力学传感器。原位SEM测试系统由静电驱动纳米拉伸试验装置（EANAT）和纳米探针操作系统组成。EANAT可以测量单轴拉伸纳米材料的伸长率通过电容传感器集成到EANAT的紫菜运动放大系统。传感分辨率为0.93nm。在EANAT上测试了通过热CVD制备的直径为51 nm的多壁CNT。在测试中得到的应力-应变关系阐明了CNT的断裂机制。在碳纳米管的断裂过程中，碳纳米管的一对外壳在第一步断裂，而另一个内芯则跟随外壳断裂。CNT的杨氏模量为约600 GPa，这与先前报道的值大致相同。

This research developed the in situ scanning electron microscopy (SEM) nanomaterial testing system to reveal mechanical & electrical properties of carbon nanotubes (CNTs) for developing novel nano mechanical sensors. The in situ SEM testing system is constituted of Electrostatically Actuated NAno Tensile testing devices (EANATs) and the nano probe manipulation system. The EANATs can measure uniaxial tensile elongation of nanomaterials by the capacitance sensor integrated into the laver motion amplification system on the EANATs. The sensing resolution was 0.93 nm. The 51 nm-diametric multiwalled CNT prepared by the thermal CVD were tested on the EANATs. The stress-strain relation obtained in the test clarified the fracture mechanism of the CNT. In the fracture process of the CNT, a couple of outer shells of CNT have broken at the first step and the other inside core of the CNT followed the outer shells to failure. The Young's modulus of the CNT was about 600 GPa, which was roughly the same as previously reported values.