Research on the spheroidal supermirror with multi-channel substrates for neutron focusing

为了满足极压粉末衍射实验等领域的需要，中子束聚焦装置是中子散射装置中不可缺少的部件。一种可制作具有微米级形状精度之椭圆形基板之制程。

Neutron beam focusing devices are indispensable in neutron scattering facilities to meet demands for various areas such as powder diffraction experiments under extreme pressure and so on. A spheroidal supermirror with multi-channel substrates has been developed using an ion beam sputtering instrument that can good quality layers with a large critical angle and using numerically controlled local wet etching(NC-LWE) process which can fabricate the elliptical substrate with the figure accuracy of micrometric level.