Research on the spheroidal supermirror with multi-channel substrates for neutron focusing

中子束聚焦装置是中子散射设施中不可缺少的设备，可以满足各种领域的需求，如极压下的粉末衍射实验等。利用离子束溅射仪和数控局部湿法蚀刻（NC-LWE）工艺，研制了一种具有多通道衬底的球面超反射镜，可以制备出具有微米级图形精度的椭圆衬底。

Neutron beam focusing devices are indispensable in neutron scattering facilities to meet demands for various areas such as powder diffraction experiments under extreme pressure and so on. A spheroidal supermirror with multi-channel substrates has been developed using an ion beam sputtering instrument that can good quality layers with a large critical angle and using numerically controlled local wet etching(NC-LWE) process which can fabricate the elliptical substrate with the figure accuracy of micrometric level.