Fabrication of self-aligned room-temperature operating single electron transistor by anodization

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In this study, the hybrid process between anodization process of aluminum (Al)and photolithography as a top-down process was developed to fabricate self-aligned room-temperature operating single electron transistors. Furthermore, anodization processes of titanium, which is one of valve metals, were controlled to directly form titanium oxide nanotube films on a substrate and they were applied to devices such as a miniaturized gas sensor and a dye-sensitized solar cell (DSC)