Actuator integrated probe for chemical scanning force microscope

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The zipper type electrostatic actuator integrated probe and the fabrication process of it are developed to apply this for time-of-flight mass analyzing scanning force microscope. Maximum displacement of 340μm and spring constant of 10N/m, which are required to pickup function and surface scanning, respectively, are achieved. The manipulation of dielectric particles is demonstrated using the developed probe. It is expected that the capability of application for chemical scanning force microscopy.