Applications of carbon nanotube films to contact materials of RF-MEMS switch
Applications of carbon nanotube films to contact materials of RF-MEMS switch
批准号:
22560142
负责人:
KINOSHITA Hiroshi
金额:
$2.75万
依托单位国家:
日本
项目类别:
Grant-in-Aid for Scientific Research (C)
财政年份:
2010
资助国家:
日本
项目状态:
已结题
起止时间:
2010 至 2012
中文摘要
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英文摘要
Radio-frequency microelectromechanical systems (RF MEMS) switches have potentially superior electrical properties. There are problems with the electrical contacts: The mechanical relay switches in RF MEMS switches are microsized, and so the contact electrodes must be considerably smaller (less than 100 μm2) . In order to solve the problem, we used carbon nanotube (CNT) films as contact materials under micro loads. Although CNT films have high contact resistances, Au film depositions on CNT films and horizontal alignment of CNTs decrease contact resistances.
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Reducing the High Frictions on Carbon Nanotube Films by Applying Oscillating Motions under Micronewton Loads
通过在微牛顿载荷下施加振荡运动来减少碳纳米管薄膜上的高摩擦
DOI:
--
发表时间:
2012
期刊:
Tribology Online
影响因子:
1
作者:
[Hiroshi Kinoshita, Masatoshi Kageyama, Aidil Azli Alias, Masahiro Fujii]
通讯作者:
Masahiro Fujii
マイクロ荷重領域におけるカーボンナノチューブ薄膜と金チップとの接触電気抵抗
微负载区碳纳米管薄膜与金片之间的接触电阻
DOI:
--
发表时间:
2010
期刊:
影响因子:
--
作者:
[Hiroshi Kinoshita, Naganori Koda, Masanori Seki, Masahiro Fujii, Yoshitada Isono, Nobuo Ohmae, 木之下博・大前伸夫]
通讯作者:
木之下博・大前伸夫
CNT 薄膜を集積したマイクロ接点電極の摩耗耐久性評価
碳纳米管薄膜集成微接触电极的磨损耐久性评估
DOI:
--
发表时间:
2012
期刊:
影响因子:
--
作者:
[末國 啓輔, 香田 永徳, 木之下 博, 花崎 逸雄,磯野 吉正]
通讯作者:
花崎 逸雄,磯野 吉正
振動印加によるカーボンナノチューブ薄膜の摩擦係数の0から1以上までのコントロール
通过施加振动控制碳纳米管薄膜的摩擦系数从0到1或更高
DOI:
--
发表时间:
期刊:
影响因子:
--
作者:
[木之下博, 蔭山正敏, アイディル アズリ エイリアス, 藤井正浩]
通讯作者:
藤井正浩
Bonding of a Carbon Nanotube Film to a Au Film at Low Temperature and Contact Resistance of the Film under Micronewton Loads
碳纳米管薄膜与金薄膜的低温键合及微牛顿载荷下薄膜的接触电阻
DOI:
10.2474/trol.6.189
发表时间:
2011
期刊:
Tribology Online
影响因子:
1
作者:
[H. Kinoshita, Y. Isonoand N. Ohmae]
通讯作者:
Y. Isonoand N. Ohmae
共 11 条
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Numerical Simulation of Dynamical Evolution of the Solar System over 5 Billion Years
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