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Applications of carbon nanotube films to contact materials of RF-MEMS switch

Applications of carbon nanotube films to contact materials of RF-MEMS switch
碳纳米管薄膜在RF-MEMS开关接触材料中的应用
批准号:
22560142
负责人:
KINOSHITA Hiroshi
金额:
$2.75万
依托单位国家:
日本
项目类别:
Grant-in-Aid for Scientific Research (C)
财政年份:
2010
资助国家:
日本
项目状态:
已结题
起止时间:
2010 至 2012

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中文摘要
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英文摘要
Radio-frequency microelectromechanical systems (RF MEMS) switches have potentially superior electrical properties. There are problems with the electrical contacts: The mechanical relay switches in RF MEMS switches are microsized, and so the contact electrodes must be considerably smaller (less than 100 μm2) . In order to solve the problem, we used carbon nanotube (CNT) films as contact materials under micro loads. Although CNT films have high contact resistances, Au film depositions on CNT films and horizontal alignment of CNTs decrease contact resistances.
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会议论文
Reducing the High Frictions on Carbon Nanotube Films by Applying Oscillating Motions under Micronewton Loads
通过在微牛顿载荷下施加振荡运动来减少碳纳米管薄膜上的高摩擦
DOI: --
发表时间: 2012
期刊: Tribology Online
影响因子: 1
作者: [Hiroshi Kinoshita, Masatoshi Kageyama, Aidil Azli Alias, Masahiro Fujii]
通讯作者: Masahiro Fujii
DOI: --
发表时间: 2010
期刊:
影响因子: --
作者: [Hiroshi Kinoshita, Naganori Koda, Masanori Seki, Masahiro Fujii, Yoshitada Isono, Nobuo Ohmae, 木之下博・大前伸夫]
通讯作者: 木之下博・大前伸夫
CNT 薄膜を集積したマイクロ接点電極の摩耗耐久性評価
碳纳米管薄膜集成微接触电极的磨损耐久性评估
DOI: --
发表时间: 2012
期刊:
影响因子: --
作者: [末國 啓輔, 香田 永徳, 木之下 博, 花崎 逸雄,磯野 吉正]
通讯作者: 花崎 逸雄,磯野 吉正
DOI: --
发表时间:
期刊:
影响因子: --
作者: [木之下博, 蔭山正敏, アイディル アズリ エイリアス, 藤井正浩]
通讯作者: 藤井正浩
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