Elucidation of Ionization Dynamics of Polymers for Nanofabrication by Using Quantum Beam

以极紫外自由电子激光（EUVFEL）和电子束为激励源，采用光谱学方法研究了抗蚀剂材料中的微观电荷动力学。结果表明，随着EUVFEL光剂量率的降低，聚合物薄膜中酸产率的量子效率增加。用脉冲辐射解法研究了聚苯乙烯-丙烯酸酯共聚物和聚4-羟基苯乙烯的电荷动力学。

The microscopic charge dynamics in resist materials was studied by spectroscopy using quantum beam(extreme-ultraviolet free-electron laser(EUVFEL) and electron beam) as excitation source. It was suggested that the quantum efficiency of the acid yield in polymer films increases with decreasing the dose rate of the EUVFEL light. The charge dynamics in poly(styrene-acrylate) copolymers and poly(4-hydroxystyrene) was also studied by using pulse radiolysis.