Resonant Grazing-Incidence Small-angle soft X-ray scattering method and its application to three-dimensional structure analysis of multylayer thin films
Resonant Grazing-Incidence Small-angle soft X-ray scattering method and its application to three-dimensional structure analysis of multylayer thin films
批准号:
22651034
负责人:
OKUDA Hiroshi
金额:
$2.29万
依托单位:
依托单位国家:
日本
项目类别:
Grant-in-Aid for Challenging Exploratory Research
财政年份:
2010
资助国家:
日本
项目状态:
已结题
起止时间:
2010 至 2012
中文摘要
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英文摘要
Resonant and nonresonant Grazing-incidence small-angle Soft X-ray scattering (SX-GISAS) has been developed to investigate three dimensional structures and their dependence on the distance from the surface. It has been demonstrated that GISAXS analysis with hard X-rays and that with soft X-rays agree each other, with apparent difference arising just from the curvature of the Ewald sphare. As a typical application of resonant GISAXS, contrast matching between the substrate an d the multilayers has been demonstrated.
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DOI:
--
发表时间:
2010
期刊:
影响因子:
--
作者:
[竹下, 加藤, 奥田, 落合, 櫻井, 藤原, 北島]
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北島
軟X線領域でのコントラストマッチングGISAXS法
软X射线区域对比匹配GISAXS方法
DOI:
--
发表时间:
2012
期刊:
影响因子:
--
作者:
[前澤亜由美, 伊村芳郎, 森田くらら, 遠藤洋史, 河合武司, 奥田浩司, 竹下浩樹, 北島義典,櫻井伸一, 小川紘樹 ,平井光博]
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奥田浩司, 竹下浩樹, 北島義典,櫻井伸一, 小川紘樹 ,平井光博
GISAXS with soft X-rays around 2 keV at Photon Factory
Photon Factory 的 GISAXS 具有约 2 keV 的软 X 射线
DOI:
--
发表时间:
2011
期刊:
影响因子:
--
作者:
[H. Okuda, K. Takeshita, S. Ochiai, Y.Kitajima]
通讯作者:
Y.Kitajima
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共振SWAXS方法的发展及其在无机材料评价中的应用
DOI:
--
发表时间:
2011
期刊:
影响因子:
--
作者:
[奥田浩司, 竹下浩樹, 落合庄治郎, 北島義典, 横山嘉彦, 才田淳治, 太田昇]
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太田昇
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尝试使用软 X 射线 GISAS 方法进行深度分辨结构分析
DOI:
--
发表时间:
2011
期刊:
影响因子:
--
作者:
[奥田, 竹下, 落合, 北島]
通讯作者:
北島
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