Development of a multi-functional molecular memory based on current silicon process

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We have proposed a multi-functional single-electron memory, where attractive organic molecules are embedded as quantum dos in a gate insulating layer. If single-electron tunneling can be controlled by energy levels of molecules, new functions, which are not realized in current inorganic quantum dots, would be integrated into current Si-based memory devices. In this study, we established a technique to embed molecules in an insulating layer without destroying them. As a result, we successfully demonstrated single-electron tunneling through molecules embedded in the proposed devise structure. The finding brought us two attractive functions, which are multilevel operation of tunneling current by heterogeneous molecules and optical manipulation with diarylethene photochromic molecules. Our achievements suggest that organic molecules possess high potential for a breakthrough in Si-based technology.