Study on surface potential contrast of secondary electron images in scanning electron microscopy

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Recent studies on scanning electron microscopy report that secondary electron imaging of nano films on a substrate shows the contrast originated in surface potential, especially in images given by low energy secondary electrons. Although, for this contrast, a model considering semiconductor-metal junction is proposed, there is not sufficient discussions for the details yet. In this study, we have (1) propose an improved evaluation method on the secondary electron detectors, and (2) studied of surface potential contrast by using nanofilms, which have compositional gradient, deposited on Si substrate.The secondary electron images of this specimen show the contrast,which reflects bulk property of the film rather than surface potential. This result suggests us to carefully elucidate this contrast model as further study.