Study on Mechanism of Micro-machining using Friction Force Microscope

摩擦力显微镜微加工机理研究

• 批准号: 09650128
• 负责人: MORITA Noboru
• 金额: $ 2.37万
• 依托单位: Chiba University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1997
• 资助国家: 日本
• 起止时间: 1997 至 1998
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09650128/
• 关键词: Micro-Machining; Friction Force Microscope; Micro-Cantilever; Single Crystal Silicon; 水平分力; 垂直分力

In order to control the process of the nanometer-scale machining precisely, it is necessary to understand the mechanism of nanometer-scale removing process. In this point of view, a unique nano-machining and measurement system, which utilizes the mechanisms of FFM, has been newly developed for the purpose of observation on nano-machining in the scale from 1 to 100 nm. The system has both a original micro-cantilever for machining and an ordinary micro-cantilever for AEM measurement, and it also has a device which can exchange two cantilevers alternatively. To evaluate the performance of the system, a single crystal silicon was machined and scratched by a simple diamond grain which was fixed on the end of the cantilever. Then, the system could make 2 mu m x 2 mu m square holes of 70 nm in maximum depth. Moreover it also could make scratches obviously and measure the lateral reaction force at a time. Those results proved the system effective in nano-machining experiments. The shape of the traces machined by different cantilevers vary obviously because of the geometrical irregularity of the tip. And, even in case of machined by same cantilever, the traces also vary little by little as repeat machining because of the wear of the cutting edge. The depth of the trace machined by the area-scanning is about 10 times as large as the line-scanning. To explain the reason, a machining model was proposed, in which machining and removing efficiency is raised up by the feed of the scanning line. The lateral machining force changed by the type of scanning, and the shape of the cutting chips, which were observed by SEM, also vary by the feed condition. These results could prove the proposed model.

为了对纳米加工过程进行精确控制，有必要了解纳米去除过程的机理。从这个角度来看，一个独特的纳米加工和测量系统，它利用FFM的机制，已被新开发的纳米加工在1至100 nm的尺度上观察的目的。该系统既有用于加工的原始微悬臂梁，又有用于AEM测量的普通微悬臂梁，并具有可交替更换两个悬臂梁的装置。为了评估系统的性能，单晶硅加工和划痕的简单的金刚石颗粒是固定在悬臂梁的端部。然后，该系统可以制作2 μ m × 2 μ m的最大深度为70 nm的方孔。同时还可以制作明显的划痕，一次性测量出横向反力.实验结果证明了该系统在纳米加工实验中的有效性。由于刀尖的几何不规则性，不同刀具加工出的轨迹形状差异很大。而且，即使在同一悬臂梁加工的情况下，由于切削刃的磨损，随着重复加工，轨迹也会逐渐变化。面扫描加工的轨迹深度约为线扫描的10倍。为此，提出了一种通过扫描线的进给来提高加工效率和去除效率的加工模型。横向切削力随扫描方式的变化而变化，切屑的形貌也随进给方式的变化而变化。这些结果可以证明所提出的模型。

项目成果

Kiwamu Ashida, Noboru Morita, Yoshitaro Yoshida: "Study on Nano-Machining Process Using Mechanism of a Friction Force Microscope(1st Report)" Transactions of the Japan Society of Mechanical Engineers. 64-626. 4072-4078 (1998)

Kiwamu Ashida、Noboru Morita、Yoshitaro Yoshida：“利用摩擦力显微镜机构进行纳米加工工艺的研究（第 1 次报告）” 日本机械工程学会会刊。

芦田 極, 森田 昇, 吉田 嘉太郎: "摩擦力顕微鏡機構を用いた極微小な機械加工の研究(第1報)" 日本機械学会論文集(C編). 64. 4072-4078 (1998)

Kiwami Ashida、Noboru Morita、Kataro Yoshida：“使用摩擦力显微镜机构进行显微加工的研究（第一份报告）”日本机械工程师学会会议记录（ed. C）64. 4072-4078（1998）。

芦田 極, 森田 昇, 吉田 嘉太郎: "摩擦力顕微鏡機構を用いた極微細な機械加工の研究(第2報)" 日本機械学会論文集(C編). 64. 4079-4085 (1998)

Kiwami Ashida、Noboru Morita、Kataro Yoshida：“利用摩擦力显微镜机构进行超精细加工的研究（第 2 次报告）”日本机械工程学会论文集（ed. C）64. 4079-4085（1998）。

Gen Sasaki, Kiwamu Ashida, Noboru Morita, Yoshitaro Yoshida: "Development of Machining and Measuring System Unifying Atomic Force Microscope (2nd Report)" Journal of Society of Grinding Engineers. 42. 322-326 (1998)

Gen Sasaki、Kiwamu Ashida、Noboru Morita、Yoshitaro Yoshida：“统一原子力显微镜的加工和测量系统的开发（第二次报告）”磨削工程师学会杂志。

佐々木 源,芦田 極,森田 昇,吉田嘉太郎: "原子間力顕微鏡-体型加工評価装置の開発(第2報)" 砥粒加工学会誌. 42・8. 322-326 (1998)

Gen Sasaki、Kiwami Ashida、Noboru Morita、Kataro Yoshida：“原子力显微镜-体形加工评估装置的开发（第2次报告）”磨料加工学会杂志42・8（1998）。