Development of precision hybrid diamond tool and its application to micro-device fabrication

本研究的目的是开发高精度的微金刚石刀具，并应用于微结构的器件制造。采用硅模制备金刚石刀具，CVD沉积金刚石，然后用FIB对棱角、棱角和棱角进行修整。金刚石工具被固定在刀架上。为了使零件准确地附着在所需位置，制造了刀具加工机床。利用研制的刀具进行了高纵横比v型槽的加工试验。

The purpose of this study was to develop high precision micro-diamond tool and to apply device fabrication with micro-structure. A diamond cutting tool was fabricated with silicon mold, and CVD diamond deposition, and then the edge with point, front, and side angles was conditioned with FIB. The diamond tool was attached to tool holders. In order to attach in desired position accurately, tool fabrication machine was fabricated. High-aspect ratio V-groove machining was demonstrated with the developed tools.