Development of three-dimensional nanomachining and measuring system and its application to nano-scale molding
三维纳米加工与测量系统开发及其在纳米级成型中的应用
基本信息
- 批准号:16360064
- 负责人:
- 金额:$ 5.57万
- 依托单位:
- 依托单位国家:日本
- 项目类别:Grant-in-Aid for Scientific Research (B)
- 财政年份:2004
- 资助国家:日本
- 起止时间:2004 至 2005
- 项目状态:已结题
- 来源:
- 关键词:
项目摘要
The 3D nanomachining and measuring system that can control with nanometer-scale accuracy have been developed in this research. In this system, the functions of position control and NC have been expanded based on surface observation function of friction force microscope (FFM). Precision positioning of cantilever was possible by using the displacement sensor in this system. It was able to exchange cantilevers for machining and measuring alternately. In addition, to enable nanomachining of silicon, a nanomachining cantilever with a pyramidal diamond tip was developed using a combination of photolithography and hot-filament chemical vapor deposition (HF-CVD). Nanomachining experiments on silicon using the cantilever are demonstrated under various machining parameters. By using this system, 3D nano-machining and measuring was achieved.
本研究开发了一套可实现纳米级精度控制的三维纳米加工与测量系统。该系统在摩擦力显微镜(FFM)表面观察功能的基础上,扩展了位置控制和数控功能。该系统利用位移传感器实现了悬臂梁的精确定位。它能够交换杠杆进行交替加工和测量。此外,为了实现硅的纳米加工,使用光刻和热灯丝化学气相沉积(HF-CVD)的组合开发了具有金字塔形金刚石尖端的纳米加工悬臂。在不同的加工参数下,使用悬臂梁对硅进行纳米加工实验。利用该系统实现了三维纳米加工和测量。
项目成果
期刊论文数量(5)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
Development and Its Applications of Diamond Array Tool Using Silicon Mold (2nd Report)
硅模金刚石阵列工具的研制及其应用(第二次报告)
- DOI:
- 发表时间:
- 期刊:
- 影响因子:0
- 作者:H.Kousaka;K.Ono;N.Umehara;J.Xu;Noboru Morita;Noboru Morita
- 通讯作者:Noboru Morita
シリコンモールドを用いたダイヤモンドアレイ工具の開発と応用(第2報)(任意切れ刃を持った加工用カンチレバーの作製)
硅模具金刚石阵列刀具的开发与应用(第二次报告)(任意切削刃加工用悬臂梁的制作)
- DOI:
- 发表时间:
- 期刊:
- 影响因子:0
- 作者:野老山貴行;中村隆;梅原徳次;冨田博嗣;竹之下雪徳;森田 昇
- 通讯作者:森田 昇
Nanomachining of silicon surface using atomic force microscope with diamond tip
- DOI:10.1115/1.2163364
- 发表时间:2006-08-01
- 期刊:
- 影响因子:4
- 作者:Kawasegi, Noritaka;Takano, Noboru;Ashida, Kiwamu
- 通讯作者:Ashida, Kiwamu
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MORITA Noboru其他文献
Metal Sphere Separation in Glass by the Two Laser Beam Illumination
两束激光照射玻璃中的金属球分离
- DOI:
10.2493/jjspe.87.581 - 发表时间:
2021 - 期刊:
- 影响因子:0
- 作者:
IMAZEKI Taichi;NISHIOKA Nobuyasu;HIDAI Hirofumi;MATSUSAKA Souta;CHIBA Akira;MORITA Noboru - 通讯作者:
MORITA Noboru
Crack Formation with Gold Inflow at Glass Surface by Voltage Application
施加电压导致玻璃表面金流入而形成裂纹
- DOI:
10.2493/jjspe.88.108 - 发表时间:
2022 - 期刊:
- 影响因子:0
- 作者:
KAWAMURA Hirofumi;MATSUSAKA Souta;HIDAI Hirofumi;CHIBA Akira;MORITA Noboru - 通讯作者:
MORITA Noboru
A study of crack generation at loading/unloading process in wheel cleaving (Circular/half-penny crack generation mechanisms)
车轮劈裂装卸过程中裂纹产生的研究(圆形/半便士裂纹产生机制)
- DOI:
10.1299/transjsme.21-00190 - 发表时间:
2021 - 期刊:
- 影响因子:0
- 作者:
IMAI Kentaro;ASARI Tomoki;MATSUMOTO Yuichiro;MATSUSAKA Souta;HIDAI Hirofumi;CHIBA Akira;MORITA Noboru - 通讯作者:
MORITA Noboru
MORITA Noboru的其他文献
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{{ truncateString('MORITA Noboru', 18)}}的其他基金
Fabrication of plasma generator enhanced hot filament and research of phase-change from diamond to graphite
等离子发生器增强热丝的制作及金刚石到石墨相变的研究
- 批准号:
25630016 - 财政年份:2013
- 资助金额:
$ 5.57万 - 项目类别:
Grant-in-Aid for Challenging Exploratory Research
Development of precision hybrid diamond tool and its application to micro-device fabrication
精密混合金刚石工具的研制及其在微器件制造中的应用
- 批准号:
23360067 - 财政年份:2011
- 资助金额:
$ 5.57万 - 项目类别:
Grant-in-Aid for Scientific Research (B)
Development of fault detection/diagnosis method of multi-layered interconnection in LSI circuit by AFM mechanism
利用AFM机制开发LSI电路多层互连故障检测/诊断方法
- 批准号:
23656101 - 财政年份:2011
- 资助金额:
$ 5.57万 - 项目类别:
Grant-in-Aid for Challenging Exploratory Research
The study on development of multifunctional diamond tools and its applications for micro/nano scale machining
多功能金刚石刀具研制及其在微纳米加工中的应用研究
- 批准号:
20360067 - 财政年份:2008
- 资助金额:
$ 5.57万 - 项目类别:
Grant-in-Aid for Scientific Research (B)
Micro-Fabrication by Using Combination Technique of Nano-scale Machining and Alkaline Etching
纳米加工与碱性蚀刻相结合的微细加工
- 批准号:
13650112 - 财政年份:2001
- 资助金额:
$ 5.57万 - 项目类别:
Grant-in-Aid for Scientific Research (C)
Study on Mechanism of Micro-machining using Friction Force Microscope
摩擦力显微镜微加工机理研究
- 批准号:
09650128 - 财政年份:1997
- 资助金额:
$ 5.57万 - 项目类别:
Grant-in-Aid for Scientific Research (C)
STUDY ON TOOL WEAR MONITORING METHOD FOR HIGH SPEED MACHINING
高速加工刀具磨损监测方法研究
- 批准号:
07650130 - 财政年份:1995
- 资助金额:
$ 5.57万 - 项目类别:
Grant-in-Aid for Scientific Research (C)
STUDY ON FLEXIBLE LAPPING AND GRAINDING TOOLS FOR MIRROR SURFACE FINISHING
镜面精加工柔性研磨刀具的研究
- 批准号:
05650107 - 财政年份:1993
- 资助金额:
$ 5.57万 - 项目类别:
Grant-in-Aid for General Scientific Research (C)
相似海外基金
Instrumentation to Enable and Enhance Three-Dimensional Nanofabrication Capabilities in the National NanofabricationUsers Network
在国家纳米制造用户网络中实现和增强三维纳米制造能力的仪器
- 批准号:
9601886 - 财政年份:1996
- 资助金额:
$ 5.57万 - 项目类别:
Standard Grant
Three-dimensional nanofabrication system for laser-driven micromachines
用于激光驱动微机械的三维纳米加工系统
- 批准号:
06555121 - 财政年份:1994
- 资助金额:
$ 5.57万 - 项目类别:
Grant-in-Aid for Developmental Scientific Research (B)