Development of three-dimensional nanomachining and measuring system and its application to nano-scale molding

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The 3D nanomachining and measuring system that can control with nanometer-scale accuracy have been developed in this research. In this system, the functions of position control and NC have been expanded based on surface observation function of friction force microscope (FFM). Precision positioning of cantilever was possible by using the displacement sensor in this system. It was able to exchange cantilevers for machining and measuring alternately. In addition, to enable nanomachining of silicon, a nanomachining cantilever with a pyramidal diamond tip was developed using a combination of photolithography and hot-filament chemical vapor deposition (HF-CVD). Nanomachining experiments on silicon using the cantilever are demonstrated under various machining parameters. By using this system, 3D nano-machining and measuring was achieved.