Detailed models of technological plasmas

技术等离子体的详细模型

• 批准号: 2006661
• 金额: --
• 依托单位: University College London
• 依托单位国家: 英国
• 项目类别: Studentship
• 财政年份: 2018
• 资助国家: 英国
• 起止时间: 2018 至 无数据
• 项目状态: 已结题
• 来源: https://gtr.ukri.org/projects?ref=studentship-2006661
• 关键词: Detailed; models; technological; plasmas

Plasma processing drives much of modern technology. The ability to model the processes reliably provide a way of rapidly developing new processes in a cost effective manner. This project will focus of tests of plasma models for key technological processes comparing various standard methods (Boltzmann, fluid, PIC) with a view to identifying the best. Processes occurring on surfaces will be explicitly considered.

等离子体处理推动了许多现代技术。对过程进行可靠建模的能力提供了一种以具有成本效益的方式快速开发新过程的方法。该项目将侧重于关键技术过程的等离子体模型测试，比较各种标准方法（玻尔兹曼，流体，PIC），以确定最佳方法。发生在表面上的过程将被明确考虑。