Optical profilometer for novel materials, microfabricated structures and microdevices

我们请求资助购买光学轮廓仪系统，该系统允许对表面，微观结构或微系统进行静态和动态3D拓扑测量。该工具使用干涉测量和图像处理算法来量化表面拓扑结构，垂直分辨率<0.1nm，横向分辨率低至0.17 μ m。它可以在大面积上提供微观结构的瞬时XYZ拓扑测量，即使是高纵横比沟槽和近锐边缘，也不会接触或损坏样品。这种非破坏性的方法不需要样品制备，因此可以很容易地用作工艺开发和设备制造期间的计量工具。此外，非常快速的测量能力允许测量运动中的设备，提供幅度，模式和固有频率的微机电系统（MEMS）和微结构，像没有其他工具可以提供。该工具将由纳米制造和纳米表征中心（CRN2）、能源、等离子体和电化学研究中心（CREPE）、MEMS微工程实验室、激光微加工实验室的研究人员使用。直接受益于该工具的研究项目范围非常广泛，包括：微机电系统、纳米电子学和光子学、使用等离子体工艺的组合化学、激光微加工、主动控制和结构健康监测等。光学轮廓仪将被安置在CRN2，这是一个完善的共享设施，向所有感兴趣的学术和工业用户开放，并由全职工作人员进行培训和维护。它将是一个重要的学习工具，因为它可以让学生看到他们的微观结构和材料，这提供了前所未有的洞察力和理解用于形成材料或制造微观结构或行为微系统的过程。

We request funding to purchase an optical profilometer system which allows static and dynamic 3D topology measurement of a surface, a microstructure, or a microsystem.  The tool uses interferometry and image processing algorithms to quantify a surface topology, with a vertical resolution of <0.1nm and lateral resolution down to 0.17 ?m.  It can provide an instantaneous XYZ topology measurement of a microstructure over large areas, even for high aspect ratio trenches and near sharp edges, without contact or damage to the sample.  This non-destructive approach does not require sample preparation, hence is can easily be used as a metrology tool during process development and device fabrication.  In addition, the very quick measurement capability allows the metrology of devices in motion, providing amplitude, modes and natural frequencies of microelectromechanical systems (MEMS) and microstructures, like no other tool can provide. The tool will be used by researchers in the Center for Nanofabrication and Nanocharacterization (CRN2), Center for Research in Energy, Plasma, and Electrochemistry (CREPE), Microengineering Laboratory for MEMS, Laser Micromachining Laboratory at U. Sherbrooke.  The range of research projects that will directly benefit from access to this tool is very broad, and includes: microelectromechanical systems, nanoelectronics and photonics, combinatorial chemistry using plasma processes, laser micromachining, active control and structural health monitoring, among others. The optical profilometer will be housed in the CRN2, which are well established shared facilities open to all academic and industrial users interested, with training and maintenance by a full-time staff. It will be an essential learning tool as it allows students to see their microstructures and materials, which provides unprecedented insight and understanding of the processes used to form the materials or make the microstructure, or the behavior microsystems.