Integrated Piezoelectric Microsystems for Actuation and Sensing

用于驱动和传感的集成压电微系统

• 批准号: FT130100543
• 负责人: Prof Andrew Fleming
• 金额: $ 52.33万
• 依托单位: The University of Newcastle
• 依托单位国家: 澳大利亚
• 项目类别: ARC Future Fellowships
• 财政年份: 2014
• 资助国家: 澳大利亚
• 起止时间: 2014-01-01 至 2019-12-20
• 项目状态: 已结题
• 来源: https://dataportal.arc.gov.au/RGS/Web/Grants/FT130100543
• 关键词: Integrated; Piezoelectric; Microsystems; Actuation; Sensing

Piezoelectric transducers provide the highest positioning accuracy of any known actuator and the highest dynamic force resolution of any known sensor. However, these capabilities are limited to macro scale applications since piezoelectric materials are not compatible with integrated circuit (IC) or Micro-Electro-Mechanical Systems fabrication processes. This project aims to extend the use of piezoelectric materials to the meso- and micro-scale by fabricating miniature piezoelectric positioning and sensor systems. These devices will include six-axis nano-positioners and ultra-high resolution accelerometers and gyroscopes. This technology will create a new market for devices that are lower cost than macro-scale systems but provide higher performance than silicon based microsystems.

压电传感器提供任何已知致动器的最高定位精度和任何已知传感器的最高动态力分辨率。然而，由于压电材料与集成电路（IC）或微机电系统制造工艺不兼容，因此这些能力限于宏观尺度应用。该项目旨在通过制造微型压电定位和传感器系统，将压电材料的使用扩展到中尺度和微尺度。这些设备将包括六轴纳米定位器和超高分辨率加速度计和陀螺仪。这项技术将为比宏观系统成本更低但比硅基微系统性能更高的设备创造一个新市场。