"Improving the speed, accuracy, and movement range of piezoelectric scanners in scanning probe microscopy"

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Piezoelectric scanner plays a vital role in the scanning probe microscope (SPM). Despite all the qualities piezoceramics have that make them the best materials for precision positioning, they are far from being ideal in the motion they generate. The ability of an SPM to eventually become an economically viable nano-fabrication tool relies on the ability of the piezoelectric actuator to move at high speed and through a large range without compromising its positioning accuracy and repeatability. At present, both aspects of performance are limited by the linearity range of piezoceramics. In addition, existing piezoelectric actuators are susceptible to noise at low speed when they are commanded to hold a constant position. Noise due to external disturbance, piezoelectic creep and thermal drift are major causes of position inaccuracy at low speeds.