"Improving the speed, accuracy, and movement range of piezoelectric scanners in scanning probe microscopy"

“提高扫描探针显微镜中压电扫描仪的速度、精度和移动范围”

• 批准号: 203433-2012
• 负责人: Sun, Qiao
• 金额: $ 1.46万
• 依托单位: University of Calgary
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2014
• 资助国家: 加拿大
• 起止时间: 2014-01-01 至 2015-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=546342
• 关键词: Improving; speed; accuracy; movement; range

Piezoelectric scanner plays a vital role in the scanning probe microscope (SPM). Despite all the qualities piezoceramics have that make them the best materials for precision positioning, they are far from being ideal in the motion they generate. The ability of an SPM to eventually become an economically viable nano-fabrication tool relies on the ability of the piezoelectric actuator to move at high speed and through a large range without compromising its positioning accuracy and repeatability. At present, both aspects of performance are limited by the linearity range of piezoceramics. In addition, existing piezoelectric actuators are susceptible to noise at low speed when they are commanded to hold a constant position. Noise due to external disturbance, piezoelectic creep and thermal drift are major causes of position inaccuracy at low speeds.

压电扫描仪在扫描探针显微镜（SPM）中起着至关重要的作用。尽管压电陶瓷具有使其成为精确定位的最佳材料的所有品质，但它们在产生运动方面还远远不够理想。SPM最终成为经济可行的纳米制造工具的能力取决于压电驱动器在高速和大范围内移动而不影响其定位精度和可重复性的能力。目前，这两方面的性能都受到压电陶瓷线性范围的限制。此外，现有的压电致动器在低速时被命令保持恒定位置时容易受到噪声的影响。由于外界干扰、压电蠕变和热漂移引起的噪声是低速下位置不准确的主要原因。