Emerging technologies in Millimeter-wave MEMS devices: From aerospace to biomedical applications

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The wireless revolution is evident in every aspect of our daily life, from satellite communications to human health. Integration and miniaturization is an obvious next step which pushes technology limits beyond those of conventional ones. Micro-Electro-Mechanical Systems (MEMS) and nanotechnology provide the opportunity to realize millimeter-wave wireless devices in much smaller size, superior performance and lower cost to satisfy the market demand. This research plan is dedicated to advancing the millimeter-wave MEMS technology for various targets covering from aerospace to biomedical applications. Primary focus of the project will be on developing a new category of MEMS devices that would be called 3D monolithic millimeter-wave MEMS. The idea is based on monolithic integration of MEMS actuators and micro-fabricated waveguide. The concept will be implemented to develop single device as well as integrated circuits and systems for satellite and automotive applications. The proposed approach promotes a new category of millimeter-wave MEMS devices that offer superior performance with much higher power handling capability compared to the existing MEMS devices. To illustrate the wide application range of the proposed concept, the developed 3D MEMS basic building block will be expanded to a scanning switch network for biomedical dental imaging. This is used to substitute X-ray imaging which is harmful to human body tissue. This research will also investigate on conventional planar MEMS technology. For instance a MEMS switch network will be implemented to change the electrical size of an antenna slightly and generate a phase shift at the far field. This can be used in phased array antenna as a source of phase shifting and avoid external phase shifters which reduces the cost considerately.