Modeling, design, analysis and tests of MEMS

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Micro Systems Technologies has been under the interest of the scientists for few decades. Although the technologies encompassed by microsystems are getting mature, there are physical phenomena associated with the small size world that are not yet well understood. This gap of knowledge imposes the need of this proposed research which points to the subject of the present application. Microstructures are the components that are part of microsystems. They carry out the specific tasks that complete the functioning of the system: detection, actuation support, oscillation. Microstructures are usually made by processes that involve depositions, patterning and photolithography. Regardless the sequence of the employed processes, the structure made this way will be subjected to phenomena that at microscale act differently than at large scale. The phenomena at small scale are little known and often they yield different results than the ones expected from running analogies with normal size world. This conflicting type of result represents a strong rationale for this research program. Although there are many available contributions in MEMS and nano system modeling, some of them are conflicting in the reported results. The main modeling approaches are the same with the ones used for regular size. This is, micro beams of few hundred micrometers are modeled using same approach as the beams in civil construction. The main objective of the proposed research program is to develop modeling approaches and procedures that enable inclusion of multiple actions of the physical phenomena that are influential at micro and nanometer size structures. Progress in this field will enable the designers of MEMS/NEMS to develop faster the applications of the micro/nano technologies.