Modeling, design, analysis and tests of MEMS

MEMS 建模、设计、分析和测试

• 批准号: RGPIN-2016-06699
• 负责人: Stiharu, Ion
• 金额: $ 2.11万
• 依托单位: Concordia University
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2016
• 资助国家: 加拿大
• 起止时间: 2016-01-01 至 2017-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=616468
• 关键词: Modeling; design; analysis; tests; MEMS

Micro Systems Technologies has been under the interest of the scientists for few decades. Although the technologies encompassed by microsystems are getting mature, there are physical phenomena associated with the small size world that are not yet well understood. This gap of knowledge imposes the need of this proposed research which points to the subject of the present application. Microstructures are the components that are part of microsystems. They carry out the specific tasks that complete the functioning of the system: detection, actuation support, oscillation. Microstructures are usually made by processes that involve depositions, patterning and photolithography. Regardless the sequence of the employed processes, the structure made this way will be subjected to phenomena that at microscale act differently than at large scale. The phenomena at small scale are little known and often they yield different results than the ones expected from running analogies with normal size world. This conflicting type of result represents a strong rationale for this research program. Although there are many available contributions in MEMS and nano system modeling, some of them are conflicting in the reported results. The main modeling approaches are the same with the ones used for regular size. This is, micro beams of few hundred micrometers are modeled using same approach as the beams in civil construction. The main objective of the proposed research program is to develop modeling approaches and procedures that enable inclusion of multiple actions of the physical phenomena that are influential at micro and nanometer size structures. Progress in this field will enable the designers of MEMS/NEMS to develop faster the applications of the micro/nano technologies.

几十年来，微系统技术一直受到科学家的关注。尽管微系统公司所包含的技术正在变得成熟，但与小尺寸世界相关的一些物理现象还没有被很好地理解。这一知识差距迫使需要进行这项拟议的研究，该研究指向本申请的主题。微结构是微系统的组成部分。它们执行完成系统功能的特定任务：检测、激励支持、振荡。微结构通常是通过涉及沉积、图案化和光刻的工艺制造的。无论所采用的工艺顺序如何，以这种方式制造的结构将受到在微尺度上的行为与在大尺度上不同的现象的影响。小尺度上的现象鲜为人知，而且它们经常产生与正常大小世界进行类比所预期的结果不同的结果。这种相互矛盾的结果代表了这项研究计划的强大理论基础。虽然在MEMS和纳米系统建模方面有很多有用的贡献，但其中一些在已报道的结果中是相互矛盾的。主要的建模方法与用于规则尺寸的方法相同。这就是说，几百微米的微梁是用与土木工程中的梁相同的方法来建模的。拟议研究计划的主要目标是开发建模方法和程序，使之能够包括对微米和纳米尺寸结构有影响的物理现象的多种作用。这一领域的进展将使MEMS/NEMS的设计者能够更快地开发微/纳米技术的应用。