Modeling, design, analysis and tests of MEMS

几十年来，微系统技术一直受到科学家们的关注。虽然微系统所包含的技术越来越成熟，但仍有一些与小尺寸世界相关的物理现象尚未得到很好的理解。这种知识的差距强加了这一研究的需要，这一研究指出了当前应用的主题。微结构是微系统的组成部分。它们执行完成系统功能的特定任务：检测、驱动支持、振荡。显微结构通常是通过沉积、图案化和光刻等工艺制成的。无论所采用的过程顺序如何，以这种方式制成的结构将受到微观尺度与大尺度不同的现象的影响。在小尺度上的现象很少为人所知，并且通常它们产生的结果与在正常规模的世界中进行类比所期望的结果不同。这种相互矛盾的结果为这项研究计划提供了强有力的依据。虽然在MEMS和纳米系统建模方面有许多可用的贡献，但其中一些在报道的结果中是相互矛盾的。主要的建模方法与用于常规尺寸的方法相同。也就是说，几百微米的微梁采用与土木建筑梁相同的方法建模。所提议的研究计划的主要目标是开发建模方法和程序，使在微和纳米尺寸结构中有影响的物理现象的多种作用能够包含在内。这一领域的进步将使MEMS/NEMS的设计者能够更快地开发微/纳米技术的应用。

Micro Systems Technologies has been under the interest of the scientists for few decades. Although the technologies encompassed by microsystems are getting mature, there are physical phenomena associated with the small size world that are not yet well understood. This gap of knowledge imposes the need of this proposed research which points to the subject of the present application. Microstructures are the components that are part of microsystems. They carry out the specific tasks that complete the functioning of the system: detection, actuation support, oscillation. Microstructures are usually made by processes that involve depositions, patterning and photolithography. Regardless the sequence of the employed processes, the structure made this way will be subjected to phenomena that at microscale act differently than at large scale. The phenomena at small scale are little known and often they yield different results than the ones expected from running analogies with normal size world. This conflicting type of result represents a strong rationale for this research program. Although there are many available contributions in MEMS and nano system modeling, some of them are conflicting in the reported results. The main modeling approaches are the same with the ones used for regular size. This is, micro beams of few hundred micrometers are modeled using same approach as the beams in civil construction. The main objective of the proposed research program is to develop modeling approaches and procedures that enable inclusion of multiple actions of the physical phenomena that are influential at micro and nanometer size structures. Progress in this field will enable the designers of MEMS/NEMS to develop faster the applications of the micro/nano technologies.