Vibrational and motional characterisation test benches for microelectromechanical systems

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The goal of this proposal is to acquire an out-of-plane vibrometer and a rotary motion simulator for the characterisation of microelectromechanical systems (MEMS). This will significantly enhance our ability to optically measure the motion of MEMS and expose them to controlled motion, thus supporting unique research programs. We currently have no means of characterizing MEMS in this fashion, as we exclusively use electrical tests for this purpose. Such tests represent non-direct measurements and are prone to parasitics and feedthrough, causing deteriorated signal pickup. To circumvent this problem, the requested equipment will allow for direct picometer-scale measurement of motion and for the application of precise and wide-ranging mechanical stimuli. Accordingly, it will open the door to the state-of-the-art characterisation of a wide range of MEMS devices of interest to our research groups such as micro-machined ultrasonic transducers, resonant sensors, optical microsystems, energy harvesters and capacitive transducers. Notably, we are carrying out several research collaborations, described herein, that will significantly benefit from the test bench enabled by the requested equipment. The equipment will be installed at ETS and primarily used by researchers of ETS and of the Université du Québec À Montréal. It is urgently needed at ETS since we do not have access locally to the requested equipment specifically configured for MEMS characterisation. The vibrometer will be integrated with our probe station for MEMS actuation, and the rotary motion simulator will be integrated with a custom vacuum chamber. Notably, such equipment is seldom configured for use with MEMS, as it is often meant for the characterisation of larger-scale devices. As configured, this equipment will enable us to directly measure the motion of MEMS in an area of 1 micrometer and to stimulate them mechanically under high acceleration and under vacuum. This will yield more versatile and enhanced characterisation methods that are currently unavailable to us. The equipment will thus enhance our ability to characterize MEMS in state-of-the-art test benches and will significantly complement our characterisation infrastructure. The equipment will directly support research activities focusing on the characterisation of innovative microsystems, and its acquisition is thus critical to the success of our current research activities and of the planned activities described herein. Notably, it will significantly increase the impact of the co-applicants’ research in Canada and abroad by providing a state-of-the-art test benches for a wide-range of MEMS devices. The equipment will be a critical element for the training of HQP in fields including MEMS such as ultrasonics, sensing, actuators, optics and energy harvesting. An expected yearly minimum of 35 HQPs will be trained to use the equipment to characterise MEMS.