Vibrational and motional characterisation test benches for microelectromechanical systems

本提案的目标是获得一个面外振动计和一个旋转运动模拟器，用于微机电系统（MEMS）的表征。这将大大提高我们光学测量MEMS运动的能力，并使其暴露于受控运动中，从而支持独特的研究计划。我们目前没有办法以这种方式表征MEMS，因为我们专门为此目的使用电气测试。这种测试是非直接测量，容易产生寄生和馈通，导致信号采集恶化。为了避免这个问题，所要求的设备将允许直接皮米尺度的运动测量和精确和广泛的机械刺激的应用。因此，它将为我们的研究小组感兴趣的各种MEMS器件的最先进特性打开大门，如微机械超声换能器，谐振传感器，光学微系统，能量采集器和电容式换能器。值得注意的是，我们正在进行几项研究合作，如本文所述，这将大大受益于由所要求的设备启用的试验台。

The goal of this proposal is to acquire an out-of-plane vibrometer and a rotary motion simulator for the characterisation of microelectromechanical systems (MEMS). This will significantly enhance our ability to optically measure the motion of MEMS and expose them to controlled motion, thus supporting unique research programs. We currently have no means of characterizing MEMS in this fashion, as we exclusively use electrical tests for this purpose. Such tests represent non-direct measurements and are prone to parasitics and feedthrough, causing deteriorated signal pickup. To circumvent this problem, the requested equipment will allow for direct picometer-scale measurement of motion and for the application of precise and wide-ranging mechanical stimuli. Accordingly, it will open the door to the state-of-the-art characterisation of a wide range of MEMS devices of interest to our research groups such as micro-machined ultrasonic transducers, resonant sensors, optical microsystems, energy harvesters and capacitive transducers. Notably, we are carrying out several research collaborations, described herein, that will significantly benefit from the test bench enabled by the requested equipment. The equipment will be installed at ETS and primarily used by researchers of ETS and of the Université du Québec À Montréal. It is urgently needed at ETS since we do not have access locally to the requested equipment specifically configured for MEMS characterisation. The vibrometer will be integrated with our probe station for MEMS actuation, and the rotary motion simulator will be integrated with a custom vacuum chamber. Notably, such equipment is seldom configured for use with MEMS, as it is often meant for the characterisation of larger-scale devices. As configured, this equipment will enable us to directly measure the motion of MEMS in an area of 1 micrometer and to stimulate them mechanically under high acceleration and under vacuum. This will yield more versatile and enhanced characterisation methods that are currently unavailable to us. The equipment will thus enhance our ability to characterize MEMS in state-of-the-art test benches and will significantly complement our characterisation infrastructure. The equipment will directly support research activities focusing on the characterisation of innovative microsystems, and its acquisition is thus critical to the success of our current research activities and of the planned activities described herein. Notably, it will significantly increase the impact of the co-applicants’ research in Canada and abroad by providing a state-of-the-art test benches for a wide-range of MEMS devices. The equipment will be a critical element for the training of HQP in fields including MEMS such as ultrasonics, sensing, actuators, optics and energy harvesting. An expected yearly minimum of 35 HQPs will be trained to use the equipment to characterise MEMS.