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Plasmas applied to micro- and nanomanufacturing

Plasmas applied to micro- and nanomanufacturing
等离子体应用于微米和纳米制造
批准号:
CRC-2016-00045
负责人:
Chaker, Mohamed
金额:
$14.57万
依托单位国家:
加拿大
项目类别:
Canada Research Chairs
财政年份:
2018
资助国家:
加拿大
项目状态:
已结题
起止时间:
2018-01-01 至 2019-12-31

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中文摘要
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英文摘要
Innovation in materials science and engineering resides in our ability to control at the nanoscale the structure of materials in order to design new materials with tailored properties (electrical, optical, magnetic, etc.). One of the most powerful means to uniquely arrange matter at the nanoscale is to use plasmas due to their unique ability to provide simultaneously a variety of particles such as ions, neutral atoms and radicals, and photons. According to this vision, the goal of the Chair is to grasp new opportunities and meet new challenges in the field of plasmas applied to micro- and nanomanufacturing.
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Plasmas applied to micro- and nanomanufacturing
Plasma synthesis of innovative thin films and nanomaterials for device fabrication
Plasmas Applied To Micro- And Nanomanufacturing
Plasma synthesis of innovative thin films and nanomaterials for device fabrication
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  • 批准号:
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