Plasma synthesis of innovative thin films and nanomaterials for device fabrication

用于器件制造的创新薄膜和纳米材料的等离子体合成

• 批准号: RGPIN-2019-06560
• 负责人: Chaker, Mohamed
• 金额: $ 4.44万
• 依托单位: Institut national de la recherche scientifique
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2021
• 资助国家: 加拿大
• 起止时间: 2021-01-01 至 2022-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=738971
• 关键词: Plasma; synthesis; innovative; thin; films

Innovation in materials science and engineering resides in our ability to control the structure of materials at the nanoscale in order to design new materials with outstanding functional properties (electrical, optical, magnetic, photocatalytic, etc.). One of the most powerful means to arrange matter at the nanoscale is to use plasmas due to their exceptional ability to provide simultaneously a variety of particles, namely ions, neutral atoms and radicals, and photons, together with a non-equilibrium environment. Plasmas are therefore unique to synthesize inorganic and organic materials in the form of either thin films or nanomaterials. My global vision is to continue to engage myself in this very fertile research field at the cutting edge of various disciplines (physics, chemistry and engineering) to generate exciting new knowledge in materials science and technology, and to conceive innovative materials processes that can be exploited for the next generation of RF and photonic devices of ever-increasing complexity, performance and functionality or for advanced environmental applications such as water treatment. In this context, my research program includes three projects tackling fundamental issues in plasma and materials science. Thanks to the newly available tools to probe matter dynamics, the first project aims to deepen the understanding of the physical phenomena governing the metal-insulator transition in doped vanadium dioxide synthesized by laser-produced plasmas. The second project intends to investigate the growth of artificially built multiferroic materials for advanced RF devices, capitalizing on our expertise in advanced nanofabrication techniques, in particular plasma-based materials synthesis and etching. The third project aims to understand low-temperature atmospheric pressure plasmas for tightly controlling nanostructured cellulose functionalization. Besides these projects that are at the heart of my long-term vision, my research program also encompasses short- and medium-term projects that respond to specific economic and environmental needs in various sectors including energy, photonics, and photocatalysis. Short-term projects include, for example, the development of vanadium dioxide-based smart radiator devices for micro- and nanosatellites in collaboration with MPB Communications, the elaboration of state-of-the-art nanofabrication processes for manufacturing integrated photonic devices with AEPONYX and the investigation of nanostructured visible light-driven heterojunctions photocatalysts for water treatment with Magnus. Finally, a major benefit stemming from this research is the training of highly qualified personnel that will constitute a future pool of expertise for both academia and industry.

材料科学和工程学的创新属于我们控制纳米级材料结构的能力，以设计具有出色功能特性（电气，光学，磁性，光催化等）的新材料。在纳米级排列物质的最强大方法之一是使用等离子体，因为它们具有出色的能力，可以同时提供各种颗粒，即离子，中性原子和自由基以及光子以及非平衡环境。因此，等离子体是以薄膜或纳米材料的形式合成无机和有机材料的独特之处。我的全球愿景是继续在各种学科（物理，化学和工程学）的最前沿中参与这个非常肥沃的研究领域，以产生令人兴奋的材料科学和技术方面的新知识，并构想可以利用的创新材料过程，这些过程可以用于下一代RF以及对越来越多的良好性，性能和功能的不断发展的RF和光子设备，例如，绩效和功能疗法，例如先进的环境处理。 在这种情况下，我的研究计划包括三个解决血浆和材料科学基本问题的项目。多亏了新近可探测动态的工具，第一个项目旨在加深对由激光生产的等离子体合成的掺杂的二氧化钒中金属绝缘体过渡的物理现象的理解。第二个项目旨在调查用于高级RF设备的人为建造的多效材料的增长，利用我们在高级纳米制造技术方面的专业知识，尤其是基于血浆的材料合成和蚀刻。第三个项目旨在了解低温大气压力等离子体，以严格控制纳米结构的纤维素功能化。 除了这些长期愿景核心的这些项目外，我的研究计划还涵盖了短期和中期项目，这些项目响应各个部门的特定经济和环境需求，包括能源，光子学和光催化。 Short-term projects include, for example, the development of vanadium dioxide-based smart radiator devices for micro- and nanosatellites in collaboration with MPB Communications, the elaboration of state-of-the-art nanofabrication processes for manufacturing integrated photonic devices with AEPONYX and the investigation of nanostructured visible light-driven heterojunctions photocatalysts for water treatment with Magnus.最后，这项研究带来的主要好处是对高素质的人员进行培训，这将构成学术界和工业的未来专业知识库。