Plasmas Applied To Micro- And Nanomanufacturing

等离子体应用于微纳制造

• 批准号: CRC-2016-00045
• 负责人: Chaker, Mohamed
• 金额: $ 14.57万
• 依托单位: Institut national de la recherche scientifique
• 依托单位国家: 加拿大
• 项目类别: Canada Research Chairs
• 财政年份: 2021
• 资助国家: 加拿大
• 起止时间: 2021-01-01 至 2022-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=729510
• 关键词: Plasmas; Applied; Micro; Nanomanufacturing

Innovation in materials science and engineering resides in our ability to control at the nanoscale the structure of materials in order to design new materials with tailored properties (electrical, optical, magnetic, etc.). One of the most powerful means to uniquely arrange matter at the nanoscale is to use plasmas due to their unique ability to provide simultaneously a variety of particles such as ions, neutral atoms and radicals, and photons. According to this vision, the goal of the Chair is to grasp new opportunities and meet new challenges in the field of plasmas applied to micro- and nanomanufacturing.

材料科学和工程的创新在于我们能够在纳米级控制材料的结构，以设计具有定制特性（电，光，磁等）的新材料。在纳米尺度上独特地排列物质的最强大的手段之一是使用等离子体，因为它们具有同时提供各种粒子（如离子、中性原子和自由基以及光子）的独特能力。根据这一愿景，主席的目标是抓住新的机遇，迎接新的挑战，在等离子体应用于微和纳米制造领域。