Plasma synthesis of innovative thin films and nanomaterials for device fabrication

用于器件制造的创新薄膜和纳米材料的等离子体合成

• 批准号: RGPIN-2019-06560
• 负责人: Chaker, Mohamed
• 金额: $ 4.44万
• 依托单位: Institut national de la recherche scientifique
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2019
• 资助国家: 加拿大
• 起止时间: 2019-01-01 至 2020-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=691062
• 关键词: Plasma; synthesis; innovative; thin; films

******Innovation in materials science and engineering resides in our ability to control the structure of materials at the nanoscale in order to design new materials with outstanding functional properties (electrical, optical, magnetic, photocatalytic, etc.). One of the most powerful means to arrange matter at the nanoscale is to use plasmas due to their exceptional ability to provide simultaneously a variety of particles, namely ions, neutral atoms and radicals, and photons, together with a non-equilibrium environment. Plasmas are therefore unique to synthesize inorganic and organic materials in the form of either thin films or nanomaterials. My global vision is to continue to engage myself in this very fertile research field at the cutting edge of various disciplines (physics, chemistry and engineering) to generate exciting new knowledge in materials science and technology, and to conceive innovative materials processes that can be exploited for the next generation of RF and photonic devices of ever-increasing complexity, performance and functionality or for advanced environmental applications such as water treatment. ******In this context, my research program includes three projects tackling fundamental issues in plasma and materials science. Thanks to the newly available tools to probe matter dynamics, the first project aims to deepen the understanding of the physical phenomena governing the metal-insulator transition in doped vanadium dioxide synthesized by laser-produced plasmas. The second project intends to investigate the growth of artificially built multiferroic materials for advanced RF devices, capitalizing on our expertise in advanced nanofabrication techniques, in particular plasma-based materials synthesis and etching. The third project aims to understand low-temperature atmospheric pressure plasmas for tightly controlling nanostructured cellulose functionalization. ******Besides these projects that are at the heart of my long-term vision, my research program also encompasses short- and medium-term projects that respond to specific economic and environmental needs in various sectors including energy, photonics, and photocatalysis. Short-term projects include, for example, the development of vanadium dioxide-based smart radiator devices for micro- and nanosatellites in collaboration with MPB Communications, the elaboration of state-of-the-art nanofabrication processes for manufacturing integrated photonic devices with AEPONYX and the investigation of nanostructured visible light-driven heterojunctions photocatalysts for water treatment with Magnus. Finally, a major benefit stemming from this research is the training of highly qualified personnel that will constitute a future pool of expertise for both academia and industry.

** 材料科学和工程的创新在于我们能够在纳米级控制材料的结构，以设计具有出色功能特性（电，光，磁，光催化等）的新材料。在纳米尺度上排列物质的最有力的手段之一是使用等离子体，因为它们具有同时提供各种粒子（即离子、中性原子和自由基以及光子）以及非平衡环境的特殊能力。因此，等离子体是合成薄膜或纳米材料形式的无机和有机材料的独特方法。我的全球视野是继续从事这个非常肥沃的研究领域在各个学科的前沿（物理，化学和工程）在材料科学和技术方面产生令人兴奋的新知识，并构思可用于下一代日益复杂的RF和光子器件的创新材料工艺，性能和功能或先进的环境应用，如水处理。****** 在这种情况下，我的研究计划包括三个项目，解决等离子体和材料科学的基本问题。得益于探测物质动力学的新工具，第一个项目旨在加深对激光等离子体合成掺杂二氧化钒中金属-绝缘体转变物理现象的理解。第二个项目旨在利用我们在先进纳米纤维技术，特别是等离子体材料合成和蚀刻方面的专业知识，研究用于先进RF器件的人工构建多铁性材料的增长。第三个项目旨在了解用于严格控制纳米结构纤维素功能化的低温大气压等离子体。** 除了这些项目是我的长期愿景的核心，我的研究计划还包括短期和中期项目，以应对包括能源，光子学和生物技术在内的各个领域的特定经济和环境需求。短期项目包括，例如，与MPB通信公司合作开发用于微型和纳米卫星的基于二氧化钒的智能散热器设备，与AEPONYX公司一起制定用于制造集成光子设备的最先进的纳米纤维工艺，以及与Magnus公司一起研究用于水处理的纳米结构可见光驱动异质结光催化剂。最后，这项研究的一个主要好处是培训了高素质的人员，他们将成为学术界和工业界未来的专门知识库。