Development of a reliable and reproducible fabrication process for AFM probes for tip-enhanced spectroscopy applications

为尖端增强光谱应用的 AFM 探针开发可靠且可重复的制造工艺

• 批准号: 522751-2018
• 负责人: LagugnéLabarthet, François
• 金额: $ 1.82万
• 依托单位: University of Western Ontario
• 依托单位国家: 加拿大
• 项目类别: Engage Grants Program
• 财政年份: 2018
• 资助国家: 加拿大
• 起止时间: 2018-01-01 至 2019-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=656364
• 关键词: Development; reliable; reproducible; fabrication; process

This project aims at solving fundamental issues involved during the fabrication of atomic-force microscope tips**coated with a metallic thin film. Nanodevice Solutions Inc. (NDS), a company specialized in the conception**and fabrication of specialty AFM probes has started investigating the production of metallized tips used for**specialized high spatial resolution applications in a new scientific instrumentation segment. These probes that**are used in nanoscale spectroscopy methods and are generally coated with a noble metal like silver or gold**benefitting from a local electromagnetic enhancement through a plasmonic effect. Nevertheless, in the case of**silver, an additional protection must be deposited to prevent the silver from oxidation and mechanical**degradation. NDS has proposed such a method based on atomic layer deposition (ALD) but first results shows**that the protection layer deposited by ALD undergoes rapid degradation. This proposal aims at investigating**such problem using the nanophotonic facility of F. Lagugné-Labarthet and the Western nanofabrication facility**for scanning electron microscopy analysis. The tips will be tested with the unique suite of setups developed in**Lagugné's group and will be used as feedback to improve the quality of the produced tips. Such measurements**will be conducted over time on a series of reference samples in order to evaluate the improvement in the**coating methodologies and the resulting mechanical and chemical stability over time.

该项目旨在解决在原子力显微镜尖端 ** 制造过程中涉及的基本问题，该尖端涂有金属薄膜。Nanodevice Solutions Inc. (NDS)，一家专门从事特种原子力显微镜探针的概念和制造的公司已经开始研究用于新的科学仪器领域的专业高空间分辨率应用的金属化尖端的生产。这些探针 ** 用于纳米级光谱学方法，通常涂有贵金属，如银或金 **，通过等离子体效应受益于局部电磁增强。然而，在 ** 银的情况下，必须沉积额外的保护以防止银氧化和机械 ** 降解。NDS提出了一种基于原子层沉积（ALD）的方法，但最初的结果表明，ALD沉积的保护层会迅速退化。本计画旨在利用F. Lagugné-Labarthet和Western nanofabrique facility** 用于扫描电子显微镜分析。这些提示将使用 **Lagugné团队开发的独特设置套件进行测试，并将用作反馈，以提高所生产提示的质量。随着时间的推移，将对一系列参考样品进行此类测量 **，以评价 ** 涂层方法的改进以及随时间推移产生的机械和化学稳定性。