Development of a super-resolution stochastical optical reconstruction raman microscope for online nanoscale electronic and photonics devices quality control.

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This research project aims at developing new sensing strategies for online monitoring of the fabrication of high value electronic and optoelectronic chips. Due to the continuous integration of always smaller building blocks arranged in complex circuitry, it become critical to monitor the integrity of these devices prior to testing and further integration in larger apparatus. For this, rapid monitoring with optical techniques that possess sufficient spatial resolution can be of interest to identify structural or connection defects. We propose to develop a new online wide-field microscopy technique based on Raman-Stochastic Optical Reconstruction Microscopy (Raman-STORM) that will provide a spatial resolution of 20 nm, which is ideally suited to identify the smallest details in modern electronic and optoelectronic chips prior to their testing and integration in devices. STORM microscopy has been developed for fluorescence microscopy and applied to biological problems. Here we propose to apply STORM modalities to Raman measurements, a spectromicroscopy technique that is a particularly well suited technique to probe and identify the nature of materials used in integrated circuits such as doped silicon or more disruptive materials such as graphene, carbon nanotubes and molecular inks used in printed electronics. Fast acquisition and digital treatment of the collected images with 20 nm resolution will yield disruptive technology that will be applicable to better quality control of high value electronic component and therefore yield to a better production rate and efficiency.