Atomic Layer Deposition of Nanodevices for Electrochemical Energy Devices

用于电化学能源器件的纳米器件的原子层沉积

• 批准号: RGPIN-2019-05206
• 负责人: Kao, Emmeline
• 金额: $ 1.97万
• 依托单位: McGill University
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2019
• 资助国家: 加拿大
• 起止时间: 2019-01-01 至 2020-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=681770
• 关键词: Atomic; Layer; Deposition; Nanodevices; Electrochemical

My research program proposes an entirely novel and innovative approach to manufacturing electrochemical energy storage devices: Atomic Layer Deposition (ALD). ALD offers the ability to deliver scalable integrated devices with no sacrifice in texturization. My group will fabricate solid-state, integrated devices by using a single ALD process to incorporate layers of electrodes and electrolytes on highly active, nanostructured substrates. This technology threatens to upend the status quo in electrochemical energy storage production, opening up new research avenues and paving the road for commercially viable scientific advances in energy storage. ******ALD is a thin-film deposition technique capable of ngström-level precision even over highly irregular structures. In a canonical two-precursor cycle, two gaseous precursors are pulsed one after another to enable a self-limiting reaction, resulting in a single layer of final material that has been deposited one atomic layer at a time. Repeating this cycle allows for precisely controlled films with growth rates on the order of 1 /cycle. ALD's unrivaled precision and conformality make it the ideal tool for my goal: innovative, generalizable mass production of nanostructured electrochemical energy storage (EES) devices. ******I aim to achieve this goal by focusing on the following short-term objectives for EES fabrication via ALD: (I) highly tunable, perovskite-based, solid-state ion-transport oxides; (II) minimally constrained device design for longer lifetimes via highly texturized nanostructured substrates (integration of cathode and electrolyte); and (III) high-throughput ALD through efficient recipe techniques and spatial design. These three research thrusts each bring fields of rich, promising potential applications aside outside of the energy storage realm. Achievement in each of these research focuses thus offers broad-reaching, contemporary implications for fields as diverse as thin-films, precise perovskite production for photovoltaics, LEDs, optoelectronics, and semiconductor devices.******If successful, these advances carry the potential to transform energy storage production and open up new avenues for scientific advances in energy storage that reach the commercial market. Doing so will bridge the gap between MEMS energy storage devices and large-scale power systems, allowing for smart energy grids with fully packaged distributed, yet centralized storage. Versatile and reliable, ALD can incorporate multiple energy storage mechanisms in a robust grid storage scheme: a battery may alleviate shortages during intermittent periods of high demand, while supercapacitors, with their superior power density, could be used to implement peak shaving and smoothing. Finally, the highly precise and conformal coating of ALD enables potential for significantly higher performance than current scalable energy storage can achieve.

我的研究计划提出了一种全新的创新方法来制造电化学储能设备：原子层沉积（ALD）。ALD提供了在不牺牲纹理化的情况下提供可扩展的集成器件的能力。我的团队将通过使用单一ALD工艺将电极和电解质层结合在高活性的纳米结构衬底上来制造固态集成器件。这项技术有可能颠覆电化学储能生产的现状，开辟新的研究途径，并为储能领域的商业可行的科学进步铺平道路。*ALD是一种薄膜沉积技术，即使在高度不规则的结构上也能达到ngström级的精度。在典型的双前体循环中，两种气态前体一个接一个地脉冲以实现自限制反应，从而产生一次沉积一个原子层的最终材料的单层。重复该循环允许精确控制膜，其生长速率为1 /循环的量级。ALD无与伦比的精确度和保形性使其成为实现我的目标的理想工具：创新的，可推广的纳米结构电化学储能（EES）器件的大规模生产。** 我的目标是通过专注于通过ALD制造EES的以下短期目标来实现这一目标：（I）高度可调的，钙钛矿基的固态离子传输氧化物;（II）通过高度纹理化的纳米结构衬底（阴极和电解质的集成）实现更长寿命的最小约束器件设计;以及（III）通过有效的配方技术和空间设计实现高通量ALD。这三个研究方向各自带来了储能领域之外丰富的、有前途的潜在应用领域。因此，这些研究重点中的每一个的成就都为薄膜、用于光致发光、LED、光电子和半导体器件的精确钙钛矿生产等不同领域提供了广泛的当代影响。如果成功的话，这些进展将有可能改变储能生产，并为储能领域的科学进步开辟新的途径，从而进入商业市场。这样做将弥合MEMS储能设备和大规模电力系统之间的差距，允许智能电网与完全封装的分布式，但集中存储。ALD具有多功能性和可靠性，可以将多种能量存储机制纳入强大的电网存储方案中：电池可以缓解高需求间歇期的短缺，而超级电容器凭借其上级功率密度，可用于实现调峰和平滑。最后，ALD的高精度和保形涂层使其具有比当前可扩展能量存储所能实现的性能更高的潜力。